1974
DOI: 10.1111/j.1365-2818.1974.tb03937.x
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Scanning transmission electron microscopy*

Abstract: SUMMARY The scanning transmission electron microscope is of quite recent origin, and it is only in the last few years that it has been shown that this instrument is capable of giving the same high resolution as the conventional electron microscope. In this article we examine the conditions necessary for the achievement of high resolution and also the various modes of contrast which can be obtained from this instrument. Finally, we suggest other ways in which the microscope can be used in future investigations.

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Cited by 56 publications
(23 citation statements)
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“…An important prerequisite for the development of analytical TEM was the development of the so-called scanning transmission electron microscope (STEM), where the specimen is scanned in a raster point-by-point with a small electron probe [3]. Although the lateral point resolution, mainly influenced by the probe size, the source brightness, the sample thickness and -as a result -by the signal-to-noise ratio of the electron microscopic image, does not exceed 0.5 nm, the STEM became a powerful tool because of the possible combination with analytical techniques such as microdiffraction, energy-dispersive Xray spectroscopy (EDXS) and electron energy loss spectroscopy (EELS).…”
Section: Introductionmentioning
confidence: 99%
“…An important prerequisite for the development of analytical TEM was the development of the so-called scanning transmission electron microscope (STEM), where the specimen is scanned in a raster point-by-point with a small electron probe [3]. Although the lateral point resolution, mainly influenced by the probe size, the source brightness, the sample thickness and -as a result -by the signal-to-noise ratio of the electron microscopic image, does not exceed 0.5 nm, the STEM became a powerful tool because of the possible combination with analytical techniques such as microdiffraction, energy-dispersive Xray spectroscopy (EDXS) and electron energy loss spectroscopy (EELS).…”
Section: Introductionmentioning
confidence: 99%
“…As can be appreciated from [4] and [6], the theoretical resolution r0, [5 ], can only be approached for very large fl.…”
mentioning
confidence: 99%
“…The considerations leading to the optimum parameters and the resulting performance in the scanning transmission electron microscope have been recently reviewed by A. V. Crewe (6) and E. Zeitler (7). We have extended the analysis of these authors to the case of a proton probe (8).…”
mentioning
confidence: 99%
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