2004
DOI: 10.1063/1.1812377
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Scanning probe microscopy with inherent disturbance suppression

Abstract: We introduce a general approach for inherently suppressing out-of-plane disturbances in scanning probe microscopy that enables higher-resolution imaging, particularly in noisy environments. In this approach, two distinct sensors simultaneously measure the probe–sample separation. One sensor measures a spatial average over a large sample area while the other responds locally to topography underneath the nanometer-scale probe. When the localized sensor is used to control the probe–sample separation in feedback, … Show more

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Cited by 11 publications
(10 citation statements)
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References 12 publications
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“…The striation pattern has been observed previously and found to be due to the resonant vibration of the piezo tube scanner (e.g. [20][21][22][23][24]). Therefore, the dominant factor that limits the response speed of the system at 0.1 s per frame was the resonance of the piezo tube [14].…”
Section: (B)supporting
confidence: 64%
“…The striation pattern has been observed previously and found to be due to the resonant vibration of the piezo tube scanner (e.g. [20][21][22][23][24]). Therefore, the dominant factor that limits the response speed of the system at 0.1 s per frame was the resonance of the piezo tube [14].…”
Section: (B)supporting
confidence: 64%
“…The striation pattern has been observed previously and found to be due to the piezo tube approaching resonant vibration frequency (e.g. Ando et al, 2001;Ando et al, 2008a;Miyagi et al, 2008;Schitter et al, 2001;Sparks and Manalis, 2004).…”
Section: Resultsmentioning
confidence: 62%
“…We recently introduced a new approach, referred to as inherent disturbance suppression, capable of addressing this problem [4]. It requires the use of a secondary sensor, mounted adjacent to the scanning probe, that measures the separation between the probe and the average sample height.…”
Section: Introductionmentioning
confidence: 99%