2006
DOI: 10.1088/0957-4484/17/6/007
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Atomic force microscopy with inherent disturbance suppression for nanostructure imaging

Abstract: Scanning probe imaging is often limited by disturbances, or mechanical noise, from the environment that couple into the microscope. We demonstrate, on a modified commercial atomic force microscope, that adding an interferometer as a secondary sensor to measure the separation between the base of the cantilever and the sample during conventional feedback scanning can result in real-time images with inherently suppressed out-of-plane disturbances. The modified microscope has the ability to resolve nanometre-scale… Show more

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Cited by 11 publications
(4 citation statements)
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“…13 Scanning provides the ability to image the electrode surface, 19 and the flexibility to form junctions at various locations on the flat surface without a return to room temperature. 24 In addition, there have also been experiments in which nanoscale junctions are formed and broken within a transmission electron microscope. The advantages of this approach are rapid experimentation and the ability to calibrate the probe displacement by scanning over nanometer-scale step height standards.…”
Section: Introductionmentioning
confidence: 99%
“…13 Scanning provides the ability to image the electrode surface, 19 and the flexibility to form junctions at various locations on the flat surface without a return to room temperature. 24 In addition, there have also been experiments in which nanoscale junctions are formed and broken within a transmission electron microscope. The advantages of this approach are rapid experimentation and the ability to calibrate the probe displacement by scanning over nanometer-scale step height standards.…”
Section: Introductionmentioning
confidence: 99%
“…Instead of tunneling current, an AFM detects interatomic forces that occur between a cantilever probe tip and a sample. Normal imaging forces are in the 1 -50 nanonewton range and cantilever deflections of less than 0.1 nm can be detected (nanoscale) [15][16][17][18][19][20][21].…”
Section: Introductionmentioning
confidence: 99%
“…When the cantilever should be engaged on the sample for the entire experiment, the referencing can be done by reading the deflection of a reference sensor. The reference sensor, which provides distance information from the cantilever substrate-to-sample can simply be another cantilever next to the measurement one, 10,11 an interferometer, 12 or an electrostatic sensor. 4 The reference sensor provides information for compensation of drift in distance from cantilever plane to sample substrate.…”
mentioning
confidence: 99%
“…14 Maintaining the set peak force without the need for an external driver or feedback is a unique capability with the introduced approach when compared to the previously demonstrated methods. 4,[10][11][12] Note that the cantilever still bends, and there is a shift in zero-force level set for the cantilever. This can be corrected by reading the displacement of the membrane.…”
mentioning
confidence: 99%