Scanning probe arrays for life sciences and nanobiology applications

Aeschimann, L.; Meister, André; Akiyama, T.; Chui, Benjamin W.; Niedermann, Philippe; Heinzelmann, H.; Rooij, N. F. de; Staufer, U.; Vettiger, P.

doi:10.1016/j.mee.2006.01.201

Cited by 38 publications

(24 citation statements)

References 8 publications

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“…The first proof of concept of the system was performed in air with a one-dimensional probe array (1 Â 4 cantilevers) previously presented in another paper [Aeschimann et al, 2006]. The rear of this silicon cantilever array was coated with 100 nm of gold to improve optical reflectivity.…”

Section: Resultsmentioning

confidence: 99%

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Favre

Polesel-Maris

Overstolz

et al. 2011

J of Molecular Recognition

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Atomic force microscopy (AFM) investigations of living cells provide new information in both biology and medicine. However, slow cell dynamics and the need for statistically significant sample sizes mean that data collection can be an extremely lengthy process. We address this problem by parallelizing AFM experiments using a two-dimensional cantilever array, instead of a single cantilever. We have developed an instrument able to operate a two-dimensional cantilever array, to perform topographical and mechanical investigations in both air and liquid. Deflection readout for all cantilevers of the probe array is performed in parallel and online by interferometry. Probe arrays were microfabricated in silicon nitride. Proof-of-concept has been demonstrated by analyzing the topography of hard surfaces and fixed cells in parallel, and by performing parallel force spectroscopy on living cells. These results open new research opportunities in cell biology by measuring the adhesion and elastic properties of a large number of cells. Both properties are essential parameters for research in metastatic cancer development.

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Section: Resultsmentioning

confidence: 99%

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Favre

Polesel-Maris

Overstolz

et al. 2011

J of Molecular Recognition

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“…The quality of this engineered cartilage is very important. Here, arrays of AFM probes [17] could be used to investigate a large surface at the relevant nanometer scale.…”

Section: Discussionmentioning

confidence: 99%

Micro- and nanosystems for biology and medicine

Staufer

Akiyama

Gullo

et al. 2007

Microelectronic Engineering

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The development of new tools and instruments for biomedical applications based on nano-(NEMS) or microelectromechanical systems technology (MEMS) are bridging the gap between the macro-and the nano-world. The well mastered microtechnique allows controlling many parameters of these instruments, which is essential for conducting reproducible and repeatable experiments in the life sciences. Examples are multifunctional scanning probe sensors for cell biology, an arthroscopic scanning force microscope for minimally invasive medical interventions and a nanopore sensor for single molecule experiments in biochemistry. This paper reviews some of the activities conducted in a fruitful interdisciplinary collaboration between physicists, engineers, biologists and physicians.Keywords: Microsystems; Nanosystems; Cell biology; AFM; Nanopore; Protein; Cartilage; Minimal invasive instrument Nanotools for biologyIn cell and structural biology the typical dimensions are spanning the length scales from a few nanometers up to centimeters. The objects of interest are very delicate and often mechanically soft, hence, investigating their functions calls for gentle and precise instruments. Very often several parameters should be simultaneously controlled in such experiments and a more or less complex system of tools is required. An appealing implementation of such systems is to employ micro-and nanofabrication techniques.Plain atomic force microscope [AFM] probes have proven to provide images of membrane proteins with subnanometer resolution in the past [1]. In order to study structural changes in voltage gated channel proteins at this level of resolution, we have developed a probe, which features a conductive tip [2]. The metal is insulated up to the apex (Fig. 1) such that Faradaic currents in buffer solutions are minimal. Different metals were tested, and PtSi proofed to be the best choice from a fabrication point of view [3]. The basic concept for fabricating such a probe followed that of standard molded silicon nitride tips. We employed anisotropic KOH etching of silicon (1 0 0)-wafers through a silicon nitride mask in order to form small pyramidal etch-pits. In one of these pits the tip will be formed. An array of them will be used as contact area. All pits were sharpened by a local low-temperature oxidation process, followed by a deposition of a thin layer of polycrystalline Si. The latter was lithographically patterned such that a thin line connection between the tip mold and the array of pits was formed. Platinum was evaporated on the full wafer and then annealed in order to form the silicide. Residual Pt was removed, and a second silicon nitride layer was deposited by means of low pressure chemical vapor deposition [LPCVD] in order to fully encapsulate the metal structure. The cantilevers were patterned by lithography and reactive ion etching [RIE], a pre-structured Pyrex-glass wafer was bonded to the nitride, and the silicon substrate was dissolved in KOH. The final step was a timed etching in buffered hydrofluoric ...

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“…5c) [76]. The group in Neuchâtel has shown arrays of 4x4 piezoresistive cantilevers with reference resistors beneath each cantilever for thermal drift compensation, for operation in liquids [94] and for life sciences applications [95,96], demonstrating large area quantitative analysis of biological cells in liquid. Rangelow et al have shown arrays of 128 piezoresistive and self-actuated (by means of the bimetal effect) cantilever proximal probes, and the corresponding measurement and control system [97].…”

Section: Cantilevers For Scanning Probe Microscopymentioning

confidence: 99%

Piezoresistive cantilevers for nanomechanical sensing

Bausells

2015

Microelectronic Engineering

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Scanning probe arrays for life sciences and nanobiology applications

Cited by 38 publications

References 8 publications

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Micro- and nanosystems for biology and medicine

Piezoresistive cantilevers for nanomechanical sensing

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