Scanning ion beam etching: A method for the fabrication of computer-generated hologram with nanometric accuracy for aspherical testing

Wang, Ruoqiu; Zhang, Zhe; Bai, Yingying; Wang, Yanchao; Yin, Xiaolin; Kong, Lingsheng; Deng, Wei; Xue, Desheng; Zhang, Xuejun

doi:10.1016/j.optlaseng.2020.106503

Cited by 8 publications

(3 citation statements)

References 16 publications

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“…e navigation field is constructed as a circle. e center position of the circle is the position of the navigation beacon, and the radius is confirmed by combining the boundary extraction results and the ship-navigation beacon collision experiment results [20].…”

Section: Analysis Of the Constructionmentioning

confidence: 75%

Research on Vessel Speed Heading and Collision Detection Method Based on AIS Data

Wang

Fan

Zheng

et al. 2022

Mobile Information Systems

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In order to better predict the sailing information data of fishing boats, make accurate prediction and spacing budget for the sailing status of ships, achieve more accurate coordination and early warning in advance, and ensure the safety of fishing boats’ laneway, the essay combined the kinematics equation and artificial neural network model to adapt to the traffic situation of fishing boats in the far sea. A course and collision test technique based on ship AIS data is proposed, and the course collision detection method of fishing boats is studied by means of actual ship beacon collision accident data. Through the practical test, taking the navigation mark 4560.117 as an example, under the detection track of the navigation mark field corresponding to R = 70, the two ships have the same track, thus verifying the practicality and feasibility of the ship navigation mark collision detection method.

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Section: Analysis Of the Constructionmentioning

confidence: 75%

Research on Vessel Speed Heading and Collision Detection Method Based on AIS Data

Wang

Fan

Zheng

et al. 2022

Mobile Information Systems

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“…The design parameters included a duty cycle of 0.5 and an etching depth of 400 nm. They were manufactured using laser direct writing and scanning ion beam etching [19].…”

Section: Experimental Verification and Discussionmentioning

confidence: 99%

Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements

et al. 2021

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Computer-generated hologram (CGH) null correctors are used as accuracy standards for interferometric measurements of optical surfaces and optical systems. Diffractive optics calibrators (DOCs) have been developed to evaluate the phase tolerance of CGHs based on scalar approximation by measuring variations in duty cycle and etching depth. However, if the grating period of a CGH < 5 λ, the scalar approximation is not accurate for phase analysis and reconstruction. In this study, the measurement errors of DOCs with small-period CGHs were investigated and experimentally verified. Results show that the imperfections of scalar approximation in CGHs cannot be ignored and the development of rigorous evaluation methods to improve the measurement accuracy of CGHs is of great practical significance.

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“…The excellent mechanical property and chemical stability of SiC make it difficult to perform micro‐fabrication process such as etching. Current SiC etching technologies include reaction ion etching, 4 inductively couple plasma etching, 5 magnetic neutral loop discharge plasma etching 6 et al. SF 6 , 7 CF 4 8 , CHF 3 , 9 NF 3 , 10 and Cl 2 11 are commonly used as etching gases.…”

Section: Introductionmentioning

confidence: 99%

Non‐damage deep etching of SiC by hybrid laser‐high temperature chemical processing

Wang

Han

Ehrhardt

et al. 2022

Int J Applied Ceramic Tech

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SiC is considered as preferred material for micro‐electro‐mechanical system in the future. The excellent mechanical property and chemical stability make it difficult to perform deep etching. The hybrid laser‐high temperature chemical etching is investigated to realize non‐damage deep etching of SiC. The influences of defocus, laser pulse interval, laser intensity, and pulse number on etching depth are researched. The optimized laser parameter for SiC non‐damage deep etching is laser intensity of 10 × 109 W/cm2 with a pulse interval of 10 ms. In order to analyze the interaction mechanism, the temperature field and laser‐induced liquid jet in the liquid environment are calculated numerically. It is concluded that the material removal mechanism consists of laser heating vaporization during laser pulse, mechanical effect of laser‐induced liquid jet impact between two adjacent laser pulses and chemical etching in laser‐induced local high‐temperature environment. The chemical reaction between SiC and mixture of HF, and HNO3 solution produces gases and fluosilicic acid and effectively reduces the roughness of the modified layer making the surface smoother, and also removes the microcracks on the side wall of the etched region.

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Scanning ion beam etching: A method for the fabrication of computer-generated hologram with nanometric accuracy for aspherical testing

Cited by 8 publications

References 16 publications

Research on Vessel Speed Heading and Collision Detection Method Based on AIS Data

Research on Vessel Speed Heading and Collision Detection Method Based on AIS Data

Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements

Non‐damage deep etching of SiC by hybrid laser‐high temperature chemical processing

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