ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

Mayrhofer, P. M.; Rehlendt, C.; Fischeneder, M.; Kučera, Martin; Wistrela, E.; Bittner, A.; Schmid, U.

doi:10.1109/jmems.2016.2614660

Cited by 42 publications

(14 citation statements)

References 52 publications

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“…The target to substrate distance was fixed at 65 mm in both cases. More details on the deposition of AlN and ScAlN can be found in [11,13]. A 150 nm molybdenum layer is deposited and patterned by wet chemical etching to create the top electrical contacts.…”

Section: Methodsmentioning

confidence: 99%

“…The major drawbacks of AlN are the relatively low piezoelectric coefficients ( , = 3.9 pm/V ) and the relatively low intrinsic electromechanical coupling factor ( , • ⁄ = 6.5% with the stiffness tensor and the thin film permittivity tensor ) [8]. In recent years, there has been an ongoing effort to replace AlN by scandium doped AlN (ScAlN) in micro electromechanical systems (MEMS) as well as in SAWs and BAWs for enhanced performance [9][10][11]. In this work, we demonstrate superior properties of ScAlN-based solidly mounted resonators (SMR) compared to AlN-based devices.…”

Section: Introductionmentioning

confidence: 99%

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Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Schneider

DeMiguel-Ramos

Flewitt

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nitride (AlN) by scandium doped aluminium nitride (ScAlN) thin films as the piezoelectric layer. The ScAlN-based resonators feature a significant improvement of the electromechanical coupling factor from ~3% to ~12% compared to the pure AlN, while the decreased stiffness of ScAlN results in a decrease of the quality factor from ~300 to ~100 due to increased damping losses in the piezoelectric material.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Schneider

DeMiguel-Ramos

Flewitt

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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“…Innovations in material processing technology and/or materials synthesis targeting increases in k 2 or reductions in tan δ increase attainable SNR. As an example, in bending 3-1 plate configurations, ScAlN has recently demonstrated the ability to achieve 2× the charge output of AlN with minimal increase in dielectric constant [16], suggesting 4× improvement in k 2 is possible over that of AlN.…”

Section: Maximum Achievable Snrmentioning

confidence: 99%

On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones

Seo

Corona

Hall

2017

Sensors and Actuators A: Physical

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A theoretical maximum achievable signal to noise ratio (SNR) for piezoelectric microphones is identified as a function of only microphone volume irrespective of architecture and construction details. For a given piezoelectric material, microphone SNR can be reduced to an expression containing only a dimensionless coupling coefficient and microphone volume. For a given material, the coupling coefficient has a theoretical upper bound defined by the most favorable deformation geometry. The ability to identify a theoretical maximum SNR as a function of only microphone size is surprising considering the numerous design variables and infinite design freedom afforded in the microphone design stage.

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“…Doping Sc element into AlN is an effective way to enhance the value of piezoelectric strain coefficient, and studies found that ScAlN has a five times higher piezoelectric constant than pure AlN [ 11 , 12 ]. P.M. Mayrhofer et al [ 13 ] fabricated and evaluated the performance of ScAlN and pure AlN-based energy harvesters. Experimentation showed that the increase of e 31 of ScAlN film contributes to the improved output characteristics compared with AlN thin film.…”

Section: Introductionmentioning

confidence: 99%

A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams

Liu

Cai

et al. 2021

Sensors

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Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is presented. The four beam suspensions are located at two sides of the mass aligned with edges of the mass, and the thickness of the beams is the same as the thickness of the mass block. In order to realize the multi-axis detection, a total of 16 sensing elements are distributed at the end of the folded beams. The structural deformations, stress distribution, and output characteristics due to the acceleration in x-, y-, and z-axis directions are theoretically analyzed and simulated. The proposed accelerometer is fabricated by MEMS processes to form Mo/AlN/ScAlN/Mo piezoelectric stacks as the sensing layer. Experiments show that the charge sensitivity along the x-, y-, and z-axes could reach up to ~1.07 pC/g, ~0.66 pC/g, and ~3.35 pC/g. The new structure can provide inspiration for the design of tri-axial piezoelectric accelerometers with great sensitivity and linearity.

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ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

Cited by 42 publications

References 52 publications

Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones

A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams

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