Scaling of microwave slot antenna (SLAN): a concept for efficient plasma generation

Korzec, D.; Werner, Florian; Winter, Roland; Engemann, J.

doi:10.1088/0963-0252/5/2/015

Cited by 92 publications

(69 citation statements)

References 70 publications

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“…One general approach to overcome the problem of inhomogeneity consists of one or two waveguides combined with slots or antennas in such a way that the electromagnetic field coupled into the reactor volume is consistently homogenous at a certain distance from the waveguide. Such large sized reactors have been constructed in circular [8][9] and planar geometry [2,[5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

Rousseau

Teboul²,

Lang

et al. 2002

Journal of Applied Physics

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Langmuir probe techniques have been used to study time and spatially resolved electron densities and electron temperatures in pulse-modulated hydrogen discharges in two different planar microwave reactors (f microwave = 2.45 GHz, t pulse = 1 ms). The reactors are (i) a standingwave radiative slotted waveguide reactor and (ii) a modified travelling-wave radiative slotted waveguide reactor, which generate relatively large plasmas over areas from about 350 cm 2 to 500 cm 2 . The plasma properties of these reactor types are of particular interest as they have been used for basic research and for plasma processing, e.g. for surface treatment and layer deposition. In the present study the pressures and microwave powers in the reactors were varied between 33 and 55 Pa and 600 and 3600 W, respectively. In regions with high electromagnetic fields shielded Langmuir probes were used to avoid disturbances of the probe characteristic. Close to the microwave windows of the reactors both the electron density and the electron temperature showed strong inhomogeneities. In the standing-wave reactor the inhomogeneity was found to be spatially modulated by the position of the slots. The maximum value of the electron temperature was about 10 eV and the electron density varied between 0.2 and 14×10 11 cm -3 . The steady state electron temperature in a discharge pulse was reached within a few tens of microseconds whereas the electron density needed some hundreds of microseconds to reach a steady state. Depending on the reactor the electron density reached a maximum between 80 and 200 µs after the beginning of the pulse.2

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Section: Introductionmentioning

confidence: 99%

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

Rousseau

Teboul²,

Lang

et al. 2002

Journal of Applied Physics

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“…[17] This microwave applicator transfers the microwave energy from a ring cavity through equidistantly positioned resonant coupling slots into the plasma chamber which consists of a quartz-glass tube.…”

Section: Plasma Processing Fundamentals and Microwave Sourcementioning

confidence: 99%

Plasma‐Enhanced CVD for Particle Synthesis Using Circulating Fluidized Bed Technology

Rohr

Borer

2007

Chemical Vapor Deposition

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Circulating fluidized beds (CFB) are widely used for gas-solid reactions. This presentation summarizes specific design and operational features for a CFB system with a non-thermal plasma. The results of coating a glass-like material using salt particles as a model substrate are shown. The potential of the new technology is broad, due to the fact that plasma-enhanced (PE)CVD can be used to combine and treat virtually any two different materials at low temperatures.

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“…This means that the statistical and experimental approach should be applied to investigate actual relations of the studied processing system by purposeful, precisely determined and pre-planned activities. (Korzec D, 1996;Hollahan J., 1974) …”

Section: Introductionmentioning

confidence: 99%

Study of the influence of the technological parameters of the air-plasma surface gouging on some quality characteristics in the surface layer

Stoyanova

Mechkarova

Yordanov

2017

AJTUV

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Abstract. The efficient use of resources on the basis of the development of scientific and technical progress requires widespread implementation of new technologies for processing of metalsKeywords: air -surface plasma cutting, welding, air-plasma surface gouging IntroductionThe aim of this paper is to establish the technological capabilities of the method of air-plasma surface gouging by applying the method of experiment planning and the method of the mathematical statistic to experimentally optimize the operation parameters and create new methods and means ensuring the improvement in the quality and efficiency of the process.For the purposes of the study, first the possibilities for a purposeful change of the speed characteristic of the process and the quality parameters of the surface after air-plasma surface gouging are studied depending on the main variables controlling the process -the type of the material being processed and the gouging mode. All this requires conducting a large number of studies in order to determine the relation between the variables controlling the process and the quality of the surface obtained by airplasma surface gouging. (Grill A., 1994; Conrads H, 1994).The analysis of the scientific publications has revealed that currently there is not enough data for the building an analytical models, because of non-linear dependencies between the components of the studied technological system. This means that the statistical and experimental approach should be applied to investigate actual relations of the studied processing system by purposeful, precisely determined and pre-planned activities.

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Scaling of microwave slot antenna (SLAN): a concept for efficient plasma generation

Cited by 92 publications

References 70 publications

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

Plasma‐Enhanced CVD for Particle Synthesis Using Circulating Fluidized Bed Technology

Study of the influence of the technological parameters of the air-plasma surface gouging on some quality characteristics in the surface layer

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