Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

Abstract

A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.

Hybrid Approach Control of Micro-Positioning Stage with a Piezoelectric Actuator

“…Their high integrative power [5,6], low heat [7,8], and low noise levels [9,10] can provide relatively large efforts, high reliability, and biocompatibility [11][12][13][14]. Because of these benefits, the piezoelectric actuator has been widely used in a variety of industries, including space exploration [15,16], active shutters, pulsed jets [17][18][19], vibration control [20][21][22][23][24], optical path control [25][26][27][28], micro-motorization of instruments [29,30], valves and pumps for implants [31][32][33][34][35][36], magnetic resonance imaging (MRI) [37,38], microsurgery [39][40][41][42], and other micro-displacement techniques [43][44][45][46][47][48]. Position control is severely hindered by the unique piezoelectric actuator structure, nonlinear hysteresis behaviors, and additional sources of positioning precision loss, such as creep drift and temperature effects…”

Influence functions for a hysteretic deformable mirror with a high-density 2D array of actuators

“…In general, DMs are distinguished in segmented and continuous facesheet mirrors, and can be further classified by means of their actuator type that is mounted below the reflective top layer to deform the mirror surface. Depending on the application, various actuator technologies are used, which include, for example, piezoelectric [6][7][8], electrostatic [9], thermal [10,11], magneto-restrictive, and shape memory alloy [12] and voice coil/reluctance actuators [13,14]. Furthermore, DMs are applied in adaptive optical systems and key instruments for space telescopes.…”

Adaptive surface shape control for magnetic fluid deformable mirrors

“…The conventional deformable mirrors, such as solid deformable mirrors [1,2] and spatial light modulators [3], have some disadvantages, for example, they are expensive and typically limited to small strokes, which imply a major limitation for some applications such as vision science [4]. A new promising technology to build a liquid deformable mirror that uses magnetic liquids has been suggested in this paper.…”

“…To observe results of the adaptive shape control method clearly, four input channels (#1,2,8, 20) are shown in the following figures.…”