2020
DOI: 10.1364/ao.397472
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Influence functions for a hysteretic deformable mirror with a high-density 2D array of actuators

Abstract: We present modeling and analysis of a hysteretic deformable mirror where the facesheet interacts with a continuous layer of piezoelectric material that can be actuated distributively by a matrix of electrodes through multiplexing. Moreover, a method to calculate the actuator influence functions is described considering the particular arrangement of electrodes. The results are presented in a semi-analytical model to describe the facesheet's deformation caused by a high-density array of actuators, and validated … Show more

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Cited by 18 publications
(11 citation statements)
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“…In Ref. 29, we describe the calculation of influence functions for the HDM by a detailed consideration of pixel shape, position, and reflective top layer. The developed semianalytical model determines the reference pressure for every single pixel, which serves as valuable input for the controller described in Sec.…”
Section: Facesheet Modeling As Input To Controlmentioning
confidence: 99%
See 1 more Smart Citation
“…In Ref. 29, we describe the calculation of influence functions for the HDM by a detailed consideration of pixel shape, position, and reflective top layer. The developed semianalytical model determines the reference pressure for every single pixel, which serves as valuable input for the controller described in Sec.…”
Section: Facesheet Modeling As Input To Controlmentioning
confidence: 99%
“…In Ref. 29, we present detailed simulation results on the fitting of the mirror surface to lowand higher-order Zernike polynomials, a preferred representation for optical wavefront aberations. The optimal pressure for each actuator was calculated by solving an overdetermined set of equations in the least-square sense, minimizing the root-mean-square deviation between actual and desired shape.…”
Section: Facesheet Modeling As Input To Controlmentioning
confidence: 99%
“…In order to increase the modeling accuracy for the HDM and give an exact definition of the electrode shape that exerts a pressure on the mirror surface, we briefly explain our model for calculating the influence functions whose complete description is out of the scope of this work and refer the interested reader to [14].…”
Section: Plate Model With Interconnection Layoutmentioning
confidence: 99%
“…Nevertheless, crucial role in aforementioned systems plays wavefront correctors. They could be divided by principle of actuation of control elements: mechanical [26] , thermally deformable [27] , liquid crystal light modulators [28] , actuated by electromagnetic forces (MEMS [29] , voice-coil deformable mirrors [30] ) and piezoelectric [31][32][33] . The latter could be categorized on two large groups: bimorph [34][35][36][37][38] and piezostack ones [39][40][41][42][43] .…”
Section: Introductionmentioning
confidence: 99%