2021
DOI: 10.1002/qute.202100079
|View full text |Cite
|
Sign up to set email alerts
|

Scalable Creation of Deep Silicon‐Vacancy Color Centers in Diamond by Ion Implantation through a 1‐μm Pinhole

Abstract: The controlled creation of quantum emitters in diamond represents a major research effort in the fabrication of single-photon devices. Here, the scalable production of silicon-vacancy (SiV) color centers in single-crystal diamond by ion implantation up to ≃ 1 𝛍m depths is presented. The lateral position of the SiV is spatially controlled by a 1-𝛍m pinhole placed in front of the sample, which can be moved nanometer precise using a piezo stage. The initial implantation position is controlled by monitoring the … Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

0
3
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 6 publications
(3 citation statements)
references
References 25 publications
0
3
0
Order By: Relevance
“…All‐optical thermometry with silicon‐vacancy (SiV) color centers [ 15 ] is free from this drawback due to their temperature‐dependent intense and narrow zero‐phonon line (ZPL) in the PL spectrum. [ 16 ] The SiV ZPL belongs to the first tissue transparency window, 700–950 nm [ 17 ] allowing one to suppress tissue autofluorescence and to improve sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…All‐optical thermometry with silicon‐vacancy (SiV) color centers [ 15 ] is free from this drawback due to their temperature‐dependent intense and narrow zero‐phonon line (ZPL) in the PL spectrum. [ 16 ] The SiV ZPL belongs to the first tissue transparency window, 700–950 nm [ 17 ] allowing one to suppress tissue autofluorescence and to improve sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…However, the reliable and reproducible fabrication of GeV − centers has remained a key challenge for practical development of GeV-based devices. In that respect, the formation yield of optically active GeV − following ion implantation was reported to be 0.4%-0.7% [11] and 1.9% [3], hence tentatively lower than in the case of SiV − (0.5%-1% [12], 0.5%-6% [13,14], ∼1%-3% [15], ∼2% [16], ∼2.5% [17], 2.5%-3.75% [18], 2.98% [19], 3.2% [3], 5% [20], 15% [21]) or SnV − (∼0.7% [22], >1% [23], 0.4%-3% [24], 1%-4% [25,26], ∼2.5% [17], ∼5% [27], 60% [28]). GeV centers have also been produced by means of recoil implantation via Xe-irradiation of thin Ge films deposited on diamond, followed by 950 • C annealing [29].…”
Section: Introductionmentioning
confidence: 91%
“…Photoluminescence (PL) measurements confirm on average one emitter per location and show Poisson statistics of SiV activation. This approach allows the error of the SiV activation yield to be improved to 2.98 + 0.21/–0.24%, a 3-fold improvement of the uncertainty of the activation yield compared to currently reported yield measurements. ,, Hanbury–Brown–Twiss (HBT) measurements were performed on a subset of potential SPEs, with 82% showing SPE statistics. The remaining emitters showed multiphoton but still nonclassical emission statistics.…”
Section: Introductionmentioning
confidence: 99%