“…This is because ESD protection involves very complex multi-coupling effects, i.e., the electro-thermal-transient-materials-process-device-circuit-layout coupling effect [39,53]. ESD device behavior modeling has been successfully used for ESD protection design simulation, where accurate ESD device models can be developed from ESD test data, but only for given ESD devices [54,55]. The development of physics-based compact ESD device models has been hindered by many technical complexities.…”