SAW propagation on proton-exchanged lithium niobate

Biebl, Erwin; Russer, P.; Anemogiannis, K.

doi:10.1109/ultsym.1989.66995

Cited by 15 publications

(15 citation statements)

References 10 publications

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“…The elastic constants c' ij of the softened LN were expressed by Ac ij , where c' ij are bulk values and A is a parameter. The elastic constants of the PE layer are approximately 60% those of bulk LN [7] [8]. The elastic constant is considered to be recovered by the annealing effect during the PRE process.…”

Section: A Calculation Proceduresmentioning

confidence: 99%

Leaky-SAW properties on reverse-proton-exchanged LiNbO<inf>3</inf>

Kakio

Shimizu

Nakagawa

2008

2008 IEEE Ultrasonics Symposium

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A proton-exchanged layer with an elastically soft property can be buried into a substrate by a reverse proton exchange (RPE) process. It is expected that the RPE layer with a property similar to that of bulk LiNbO 3 (LN) will prevent the degradation of the coupling factor and that the buried PE layer will reduce the leaky SAW (LSAW) attenuation. In this study, first, a layered structure of air/bulk LN/softened LN was assumed for the rotated Y-X LN and the LSAW attenuation was calculated. The rotation angle from the Y-axis giving zero attenuation shifted from 64˚ toward 5˚ for a metallized surface. The range of rotation angles at which the LSAW phase velocity exceeds that of a fast shear bulk wave was markedly expanded for a free surface, and the attenuation vanished at these boundaries. Next, the LSAW propagation loss PL was measured on 41˚ Y-X LN. The PL for the metallized surface was decreased by carrying out the RPE process from 0.036 dB/λ of a virgin sample to 0.015 dB/λ. The decrease of the PL for the free surface was also observed.

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Section: A Calculation Proceduresmentioning

confidence: 99%

Leaky-SAW properties on reverse-proton-exchanged LiNbO<inf>3</inf>

Kakio

Shimizu

Nakagawa

2008

2008 IEEE Ultrasonics Symposium

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“…It is carried out by immersing the LiNbO 3 substrate into a molten proton source, such as benzoic acid [1][2][3][4][5][6][7][8][9][10][11][12][13][14], phosphoric acid [15,16], and pyrophosphoric acid [17][18][19][20][21]. The advantages of protonexchanged (PE) LiNbO 3 waveguides in optical applications are a nearly step-like refractive index profile, larger increase of the extraordinary refractive index and higher threshold of the optical damage.…”

Section: Introductionmentioning

confidence: 99%

“…Recent studies indicate that PE LiNbO 3 waveguides may change the properties of surface acoustic waves (SAWs) [4,[8][9][10][11]. For example, the velocity change of a SAW is larger than that obtained by a conventional Tiindiffusion process [22], the elastic constants of the PE layer are decreased [11], and the piezoelectric properties are reduced to near zero in the PE layer [4].…”

Section: Introductionmentioning

confidence: 99%

“…For example, the velocity change of a SAW is larger than that obtained by a conventional Tiindiffusion process [22], the elastic constants of the PE layer are decreased [11], and the piezoelectric properties are reduced to near zero in the PE layer [4]. These results offer new applications of PE LiNbO 3 waveguides in the fields of guided SAWs and guided optical waves.…”

Section: Introductionmentioning

confidence: 99%

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Marked Enhancement of Photoconductivity and Quenching of Luminescence in Poly(2,5-dialkoxy-p-phenylene vinylene) upon C₆₀ Doping

Yoshino

Yin

Muro

et al. 1993

Jpn. J. Appl. Phys.

112

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Surface acoustic wave (SAW) properties of z -cut LiNbO 3 waveguides fabricated by proton exchange using octanoic acid are investigated. The phase velocity V p and electromechanical coupling coefficient K 2 of SAWs are significantly decreased by the increase of kd , where k is the wavenumber (2π/λ) and d is the waveguide depth. The insertion loss IL of a SAW is increased by the increase of kd and becomes nearly constant at kd ≥ 0.13. The temperature coefficient of delay TCD of a SAW calculated from the frequency change shows an apparent increase with kd , reaching a maximum at kd = 0.213, then slightly decreasing at higher kd . On the other hand, the effects of annealing on V p and IL are also investigated. The results show that post-annealing can result in a restoration of the decreased V p and an improvement of IL.

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“…The method is difficult to implement and is computationally expensive, but has the advantage of allowing a quantitative assessment of the errors in the fitted elastic constants [8]. A number of other methods, some of which are specific to acoustic microscopy, have been used to reduce the computational burden [15][16][17], and their merits are discussed elsewhere [8,17].…”

Section: Fittinand Proceduresmentioning

confidence: 99%

Elastic Constants of a Stressed Layer from Surface Acoustic Wave Measurements

Sklar

Mutti

Briggs

1995

Review of Progress in Quantitative Nondestructive Evaluation

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Parks Road Oxford OXl 3PH England INTRODUCTIONIt is well known that the propagation of both bulk and surface acoustic waves (SAWs) is affected by the presence of static stresses, a phenomenon known as the acoustoelastic effect. Ultrasonic measurements of velocity therefore depend on the stresses within the material, as well the elastic constants and the density. Although the effect of stress on the velocity is small, many ultrasonic methods are sufficiently accurate to detect the changes involved. When inverting such measurements to obtain elastic constants, it is desirable to take the effect of stress into account. Similarly, when using ultrasonic methods to measure stress, it is necessary to have accurate values for the elastic constants. In practice, the material parameters of the 'natural', unstressed state are often either completely unknown or not known with sufficient accuracy (as is usually the case for residual stresses), or else cannot be assumed to be equal to bulk values (as in the case of layered materials). This is a major distinction between situations involving residual as opposed to applied stress, since a reference state of some description is always available in the latter case.In this paper we show how to improve the estimation of the elastic constants of the natural state of a residually stressed layer from SAW measurements. To do this, we incorporate the stress into the forward calculation of the SAW velocity, so that fitting of the measured SAW dispersion then yields the elastic constants of the unstressed state. We then apply the procedure to GaAs wafers implanted with Si+ ions. BACKGROUND

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SAW propagation on proton-exchanged lithium niobate

Cited by 15 publications

References 10 publications

Leaky-SAW properties on reverse-proton-exchanged LiNbO<inf>3</inf>

Leaky-SAW properties on reverse-proton-exchanged LiNbO<inf>3</inf>

Marked Enhancement of Photoconductivity and Quenching of Luminescence in Poly(2,5-dialkoxy-p-phenylene vinylene) upon C₆₀ Doping

Elastic Constants of a Stressed Layer from Surface Acoustic Wave Measurements

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SAW propagation on proton-exchanged lithium niobate

Cited by 15 publications

References 10 publications

Leaky-SAW properties on reverse-proton-exchanged LiNbO<inf>3</inf>

Leaky-SAW properties on reverse-proton-exchanged LiNbO<inf>3</inf>

Marked Enhancement of Photoconductivity and Quenching of Luminescence in Poly(2,5-dialkoxy-p-phenylene vinylene) upon C60 Doping

Elastic Constants of a Stressed Layer from Surface Acoustic Wave Measurements

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Marked Enhancement of Photoconductivity and Quenching of Luminescence in Poly(2,5-dialkoxy-p-phenylene vinylene) upon C₆₀ Doping