1975 Ultrasonics Symposium 1975
DOI: 10.1109/ultsym.1975.196515
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SAW Oscillator Pressure Sensors

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Cited by 37 publications
(6 citation statements)
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“…The first ideas of using surface acoustic wave (SAW) devices as sensors have already been developed around 40 years ago [ 1 , 2 , 3 , 4 ] with a continuous development since then for a wide range of application fields. SAW sensors are proven to work in harsh environments [ 5 ] and are used for sensing of temperature, pressure, torque, acceleration, humidity and more [ 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 ].…”
Section: Introductionmentioning
confidence: 99%
“…The first ideas of using surface acoustic wave (SAW) devices as sensors have already been developed around 40 years ago [ 1 , 2 , 3 , 4 ] with a continuous development since then for a wide range of application fields. SAW sensors are proven to work in harsh environments [ 5 ] and are used for sensing of temperature, pressure, torque, acceleration, humidity and more [ 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 ].…”
Section: Introductionmentioning
confidence: 99%
“…The first pressure sensor based on SAW was proposed in 1975 by Reeder et al [ 7 ]. It consisted of SAW delay line transducers fabricated on the surface of a pressure-dependent membrane made of ST-X quartz.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years there has been growing attention to surface acoustic wave (SAW) devices for the detection of various physical and chemical parameters including temperature [1,2], acceleration [3][4][5][6][7][8], force [9], pressure [10][11][12][13], DC and AC high voltages [14][15][16], electric fields [17], magnetic fields [18], weight percentage in solutions [19], ionic concentration [20], gas flow [21], dew point [22] and gas and vapour concentration [23][24][25][26][27][28][29][30][31][32][33][34][35][36][37][38]. Table 1 gives an idea of the research work done since 1981 on SAW chemical sensors.…”
Section: Introductionmentioning
confidence: 99%