Sandwich-type ferromagnetic RF integrated inductor

Yamaguchi, Masahiro; Baba, Masahiro; Arai, Ken‐ichi

doi:10.1109/22.971617

Cited by 106 publications

(26 citation statements)

References 6 publications

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“…iniature Radio Frequency (RF) inductors with magnetic thin films are currently under research for use in impedance matching networks and lumped element filters for applications including cellular phones, laptop computers, and various RF communication devices [1]- [4]. Most RF inductors have a spiral and planar design because their inductance densities are typically higher than the densities of meander designs.…”

Section: Introductionmentioning

confidence: 99%

Relation Between High-Frequency Properties and Direction of Anisotropy Magnetic Field in Magnetic Thin Film for RF Inductor Applications

Sonehara

Sato

2012

IEEE Trans. Magn.

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A relation between high-frequency properties, and angle  of the easy axis in soft magnetic film and ac applied field was investigated in order to fabricate the film for RF spiral inductor without a localized EMI (Electro-Magnetic Interference). This relationship was measured using a soft CoFeSiO/SiO 2 granular multilayer magnetic thin film and simulated by using LLG (LandauLifshitz-Gilbert) micromagnetic simulator. The measured and calculated frequency dependence of the film's complex relative permeability,  r ' and  r ", compared well with 10 % mean error. The real part of complex relative permeability  r ' was dependent on approximately sin 2 . The ferromagnetic resonance (FMR) frequency, f r , and the FMR half-width, f r were not dependent on the angle, . They were estimated to be 2.54 GHz and 0.3 GHz, respectively. These results are significant for the design of various magnetic thin film spiral inductors in RF integrated circuits without localized EMI.Index Terms-Magnetic thin film spiral inductor, LLG micromagnetic simulator, Direction of anisotropy magnetic field, CoFeSiO/SiO 2 granular multilayer magnetic film, Permeability, FMR frequency.

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Section: Introductionmentioning

confidence: 99%

Relation Between High-Frequency Properties and Direction of Anisotropy Magnetic Field in Magnetic Thin Film for RF Inductor Applications

Sonehara

Sato

2012

IEEE Trans. Magn.

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“…A high-permeability material increases the L and Q factor of inductors by increasing magnetic flux density and decreasing coil resistance and parasitic capacitance [1,2]. A 2 µm thick CoZrTa magnetic film inductor with relative permeability (μ r ) of about 1000 showed a high L density of 1.3 µH/mm 2 and a 28 times increase in L compared to that of the air-core inductor [2].…”

Section: Introductionmentioning

confidence: 99%

Ferrite Magnetic-Anisotropy Field Effects on Inductance and Quality Factor of Planar GHZ Inductors

Lee¹,

Hong²,

Yun³

et al. 2016

PIER

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Abstract-Planar gigahertz (GHz) inductors were fabricated based on high crystalline-anisotropy Zn 0.13 Co 0.04 Ni 0.63 Fe 2.2 O 4 (Zn-Co-Ni ferrite) and Ba 3 Co 2 Fe 24 O 41 (Co 2 Z hexaferrite) and characterized for inductance (L) and quality (Q) factor. The planar ferrite inductors show an L of 4.5 nH (Zn-Co-Ni), 5.6 nH (Zn-Co-Ni + low H k and f FMR Co 2 Z:), and 4.8 nH (Zn-Co-Ni + high H k and f FMR Co 2 Z:) at 2 GHz. The corresponding L-densities are 18.0, 22.4, and 19.2 nH/mm 2 , which are greater than 16.8 nH/mm 2 of the air-core inductor. With respect to the Q factor, the air-core and ferrite inductors exhibit Q factors of 6.7 (air-core), 4.8 (Zn-Co-Ni), 2.8 (Zn-Co-Ni + low H k Co 2 Z), and 4.0 (Zn-Co-Ni + high H k Co 2 Z) at 2 GHz. The tan δ µ of the ferrites caused a reduction in the Q factor. Nevertheless, the high H k and f FMR Co 2 Z ferrite inductor demonstrates a higher Q factor than that of the low H k and f FMR Co 2 Z inductor. It is, therefore, suggested that high resistivity, anisotropy, magnetization ferrite can produce large L density and Q factor GHz inductors.

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“…Air-core spiral inductors are more commonly used because they can be fabricated with integrated technologies more easily. However, the use of magnetic materials in such inductors only provides a moderate increase of inductance 2)- 3) . Since it provides higher inductance density, toroidal design is interesting for down-sizing inductor footprint.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Exchange-Biased Magnetic Materials for High Density GHz Toroidal Integrated Inductors

Orlando

Royet²,

Lamy

et al. 2006

J. Magn. Soc. Jpn.

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We evaluated the interest of exchanged-biased magnetic materials for integrated toroidal inductors with operating frequency above 1GHz. Exchange-biased magnetic materials enable designers to use closed magnetic cores up to 5GHz, which lead to very high inductance densities. We used simple considerations about DC resistance and gyromagnetic losses in order to estimate the upper limitations of such devices in terms of quality factor. These estimations were used in order to optimize the properties of toroidal magnetic core at 2GHz operating frequency. We used physical parameters based on experimental data for Fe65Co35 ferromagnetic layers coupled with NiMn, NiO or IrMn antiferromagnetic layers. We found that (Fe65Co35/IrMn) multilayers provide the best trade-off for integration and that quality factor limitations can be overcome by the use of thick (≥1µm) multilayer cores. Also, an important issue for high quality factor is to lower the damping parameter (≤0.01). Inductance densities of optimized devices were also calculated and were found to be in most cases higher than for air-core spiral inductors. These results may orientate material developments in order to meet the requirements for future high density microwave inductive devices fabrication.

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Sandwich-type ferromagnetic RF integrated inductor

Cited by 106 publications

References 6 publications

Relation Between High-Frequency Properties and Direction of Anisotropy Magnetic Field in Magnetic Thin Film for RF Inductor Applications

Relation Between High-Frequency Properties and Direction of Anisotropy Magnetic Field in Magnetic Thin Film for RF Inductor Applications

Ferrite Magnetic-Anisotropy Field Effects on Inductance and Quality Factor of Planar GHZ Inductors

Evaluation of Exchange-Biased Magnetic Materials for High Density GHz Toroidal Integrated Inductors

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