The preparation of a high-performance hole transport layer is a pivotal factor in achieving efficiency and stable perovskite solar cells. 2,2',7,7'-Tetrakis[N, N-di(4-methoxyphenyl)amino]-9,9'-spirobifluorene (Spiro-OMeTAD) currently stands as the most widely employed hole transport material in high-performance perovskite solar cells. The current methodologies for its preparation primarily revolve around three techniques: O2 oxidation, cobalt salt doping, and CO2 bubbled doping. In this study, we systematically investigated and analyzed Spiro-OMeTAD prepared through these three techniques. A comprehensive study of defects in Spiro-OMeTAD thin film was conducted, considering physicochemical properties, energy level structure, crystal structure, surface morphology, and film stability. Subsequently, we analyzed MAPbI3/Spiro-OMeTAD films in terms of physical and chemical properties, surface morphology, stability, and photovoltaic performance. This research aims to provide a guide for subsequent Spiro-OMeTAD film fabrication processes.