Roughness measurement and ion-beam polishing of super-smooth optical surfaces of fused quartz and optical ceramics

Abstract

The main problems and the approach used by the authors for roughness metrology of super-smooth surfaces designed for diffraction-quality X-ray mirrors are discussed. The limitations of white light interferometry and the adequacy of the method of atomic force microscopy for surface roughness measurements in a wide range of spatial frequencies are shown and the results of the studies of the effect of etching by argon and xenon ions on the surface roughness of fused quartz and optical ceramics, Zerodur, ULE and Sitall, are given. Substrates of fused quartz and ULE with the roughness, satisfying the requirements of diffraction-quality optics intended for working in the spectral range below 10 nm, are made.

Nanoscale surface characterization using laser interference microscopy

“…Super smooth surfaces roughness measurement is one of the actual problems of optical industry and microelectronics [15,16]. The roughness of laser mirror surface determines directly the laser beam scattering which leads to energy losses in a resonator.…”

“…The uncertainty values difference for WLI and MIM caused by reflection ratio difference of substrate (<1% reflection) and mirror (∼10% for l = 532 nm). The substrate of crystalline glass-ceramic material (sitall) and mirror for 633 nm spectral range have been used for this experiment [21].…”

Бериллий Как Материал Для Термостойких Рентгеновских Зеркал

“…В настоящей работе механическая полировка заканчивалась стандартными порошками алмаза микронного размера. В работе [26] было показано, что при полировании плавленого кварца на финальной стадии при переходе с порошка с размером 1 µm к порошку 0.2 µm среднечастотная шероховатость упала более чем в 3 раза, что в конечном итоге, дополнив этот результат ионнопучковой полировкой ионами ксенона, удалось достичь рекордно низких шероховатостей. Мы надеемся, что этот подход позволит уменьшить среднечастотную шероховатость Be : Ni-подложек.…”

A Polishing-free Etching Method for Microstructure Observation of Fine-grained Ceramics

“…Lateral cracks and grain pullout can result from the machining processes and are barriers to detailed information on the microstructure. Although newly developed advanced polishing technologies, such as mechanical polishing [9], chemical polishing [11], or ion-beam polishing [12], can sharply minimize the destruction of the original microstructure of ceramics, extensive hands-on experience is still needed to properly prepare high-quality samples.…”