Room temperature multiplexed gas sensing using chemical-sensitive 3.5-nm-thin silicon transistors

Abstract

Multigas sensors on a chip with chemical-sensitive nanoscale silicon transistors.

Transistor‐Based Work‐Function Measurement of Metal–Organic Frameworks for Ultra‐Low‐Power, Rationally Designed Chemical Sensors

“…We generally observe that the sensitivity of MOF work-function shifts to chemical adsorption events is mediocre compared to that of metals. [16,19] To mitigate this, the CS-FET platform has ab uilt-in response multiplier with its substrate voltage V SUB . These findings suggest that work-function monitoring of MOFs is as ensitive, if nondescript, measureo faMOF stability in reactive environments.…”

“…However,i ndirect measurement of work function with ab ulk silicon chemical-sensitivef ield-effect transistor (CS-FET) can leverage the same sensing characteristics but with am uch smaller size, lower cost, and lower power (on the ordero fm icrowatts). [16] These devices are advantageous over otherw ork-function-based sensors (e.g.,s ilicon nanowires or metallicn anostructures [17,18] )b ecause the bulk siliconi sp racti-cally inert unless functionalized,w hereas other structures tend to have very poor selectivity.I na ddition, bulk silicon provides am ore manufacturable platform for,f or example, distribution as part of an Internet-of-Things sensora rray.…”

Bioinspired Electronics for Artificial Sensory Systems

“…j) Real‐time multiplexed sensing data to different gases. Reproduced under the terms of the Creative Commons CC BY 4.0 License . Copyright 2017, the Authors.…”

“…Chemically sensitive inorganic elements, which have high affinity with odorless target gases, can supplement these missing detection capabilities. Palladium (Pd) has been widely used as a functional material for hydrogen (H 2 ) sensing, which is undetectable with a biological sensory system, because H 2 is colorless and odorless. Recent chemical sensitive transistors demonstration included such gas detectors (Figure i), where Pd was used as the primary perception element in the FET‐based transducer to induce current change in response to H 2 absorption .…”

Freestanding 3D Mesostructures, Functional Devices, and Shape‐Programmable Systems Based on Mechanically Induced Assembly with Shape Memory Polymers

“…Complex 3D functional architectures are of widespread interest due to their potential applications in biomedical devices, metamaterials, energy storage and conversion platforms, and electronics systems . Although existing fabrication techniques such as 3D printing, templated growth, and controlled folding can serve as powerful routes to diverse classes of 3D structures that address requirements in a number of interesting technologies, each has some set of limitations in materials compatibility, accessible feature sizes, and compatibility with well‐developed 2D processing techniques used in the semiconductor and photonics industries . Despite significant efforts in research and development, there remains a need for methods that provide access to complex 3D mesostructures that incorporate high‐performance materials.…”