Role of the metal supply pathway on silicon patterning by oblique ion beam sputtering

Redondo-Cubero, A.; Palomares, F. J.; Lorenz, K.; Rubio-Zuazo, J.; Hübner, René; Mompeán, F. J.; Garcı́a-Hernández, M.; Castro, Germán R.; Vázquez, Luís

doi:10.1016/j.apsusc.2021.152267

Cited by 6 publications

(2 citation statements)

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“…Furthermore, for incidence angles larger than the threshold value, the induced patterns displayed short-range hexagonal order, instead of the expected ripple shape [149]. Also, due to the Fe implantation the silicide-rich regions were rather localized on the surface, and close to the edge of the induced nanostructures [148][149][150]. This can be appreciated in figure 18 where localized Fe-rich regions (green in figure 18(a) and dark grey in figure 18(b)) are observed at the edges of the protruding nanostructures.…”

Section: Reactive Ionsmentioning

confidence: 88%

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Surface nanopatterning by ion beam irradiation: compositional effects

Vazquez

Redondo-Cubero

Lorenz

et al. 2022

J. Phys.: Condens. Matter

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Surface nanopatterning induced by ion beam irradiation (IBI) has emerged as an effective nanostructuring technique since it induces patterns on large areas of a wide variety of materials, in short time, and at low cost. Nowadays, two main subfields can be distinguished within IBI nanopatterning depending on the irrelevant or relevant role played by the surface composition. In this review, we give an up-dated account of the progress reached when surface composition plays a relevant role, with a main focus on IBI surface patterning with simultaneous co-deposition of foreign atoms. In addition, we also review the advances in IBI of compound surfaces as well as IBI systems where the ion employed is not a noble gas species. In particular, for the IBI with concurrent metal co-deposition, we detail the chronological evolution of these studies because it helps us to clarify some contradictory early reports. We describe the main patterns obtained with this technique as a function of the foreign atom deposition pathway, also focusing in those systematic studies that have contributed to identify the main mechanisms leading to the surface pattern formation and development. Likewise, we explain the main theoretical models aimed at describing these nanopattern formation processes. Finally, we address two main special features of the patterns induced by this technique, namely, the enhanced pattern ordering and the possibility to produce both morphological and chemical patterns.

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