Role of Point Defects and Defect Complexes in Silicon Device Processing: Summary Report and Papers of the Second Workshop, 24-26 August 1992, Breckenridge, Colorado

Sopori, Bhushan; Tan, T. Y.

doi:10.2172/10179240

1994

DOI: 10.2172/10179240

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Role of Point Defects and Defect Complexes in Silicon Device Processing: Summary Report and Papers of the Second Workshop, 24-26 August 1992, Breckenridge, Colorado

Bhushan Sopori¹,

T. Y. Tan²

Abstract: Portions of this document may be illegible in electronic image products. Images are produced from the best available original document.

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Role of Point Defects and Defect Complexes in Silicon Device Processing: Summary Report and Papers of the Second Workshop, 24-26 August 1992, Breckenridge, Colorado

Abstract: Portions of this document may be illegible in electronic image products. Images are produced from the best available original document.

Cited by 0 publications

References 5 publications

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