Role of plasmon decay in secondary electron emission in the nearly-free-electron metals. Application to aluminum

Chung, M. S.; Everhart, T. E.

doi:10.1103/physrevb.15.4699

Cited by 128 publications

(65 citation statements)

References 45 publications

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“…It is instructive to compare this result with that of a frequently applied argument in elementary theories of secondary electron emission (BRUINING, 1954;CHUNG et al, 1974CHUNG et al, , 1977. In the present notation, the production rate of liberated electrons per energy, depth and bombarding ion is laV(E,X)/aEI.…”

Section: Qualitative Considerationsmentioning

confidence: 83%

Electron Emission from Solids During Ion Bombardment. Theoretical Aspects

Sigmund

Tougaard

1981

Springer Series in Chemical Physics

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This contribution is devoted to the theory of ion-induced electron emission from solids, with the emphasis on bulk as opposed to surface processes. With the aim of describing yields and energy spectra of emitted electrons, we discuss pertinent elementary processes, l.e., primary and secondary excitation, electron transport, and escape. I'lith regard to the primary process, proper distinction is made between high-and low-velocity ions, and reference is made to the physics of ion-atom collisions as well as to dielectric stopping theory. The discussion of secondary excitation makes reference to the theory of ionization cascades as well as atomic recoil cascades. Electron transport is considered first in an infinite medium and subsequently, within the diffusion approximation, in a semi-infinite medium. Special attention is paid to pertinent electron mean free paths, inelastic processes being estimated on the basis of the free-electron-gas model of a solid. We find that the neglect of elastic scattering of electrons in most existing treatments of electron emission has severe consequences on the interpretation of structure in measured electron spectra. Comments are made on the escape depth of electrons.

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Section: Qualitative Considerationsmentioning

confidence: 83%

Electron Emission from Solids During Ion Bombardment. Theoretical Aspects

Sigmund

Tougaard

1981

Springer Series in Chemical Physics

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“…On the one hand, more primary electrons are backscattered compared to the case without surface excitations (see Figure 2), so that an increase in the simulated deposition rate might be expected (at least for primary energies in the 1-2 keV regime and below). On the other hand, more slow (≤50 eV) secondary electrons will be available from the decay of surface plasmons [56] excited by either the incoming electrons or the outgoing electrons (backscattered electrons or emitted secondary electrons). This should also contribute to an increase of the simulated deposition rate and additionally lead to an enhancement of the FEBID proximity effect.…”

Section: Resultsmentioning

confidence: 99%

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

Salvat–Pujol¹,

Valentí²,

Werner³

2016

Nano Online

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The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few keV and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.

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“…This assumption follows Chung's work (Chung & Everhart, 1977) on plasmon damping. Under this procedure, with the differential energy loss cross section or the secondary electron excitation function determined using SPA, all SEs were assumed to be excited in the same way as through plasmon damping.…”

Section: Electron Cascadingmentioning

confidence: 95%