Role of Ag-catalyst morphology and molarity of AgNO₃ on the size control of Si nanowires produced by metal-assisted chemical etching

Silicon Nanostructures for Molecular Sensing: A Review

“…Huang and co-workers presented an overview behavior of isotropic and anisotropic etching of crystalline Si under various influencing parameters on the MACE process . Particularly, morphology and molarity of catalyst used in the MACE process control the size of SiNWs, which was reported by Nichkalo and coworkers . In another report, Rajkumar et al have examined the morphological tuning from irregular porous to regular NW geometry by tailoring the size of silver catalyst and concentration of oxidation agent (i.e., H 2 O 2 ) .…”

“…94 Particularly, morphology and molarity of catalyst used in the MACE process control the size of SiNWs, which was reported by Nichkalo and coworkers. 95 In another report, Rajkumar et al have examined the morphological tuning from irregular porous to regular NW geometry by tailoring the size of silver catalyst and concentration of oxidation agent (i.e., H 2 O 2 ). 43 The wellisolated silver nanoparticles (AgNPs) with size 30 nm yield irregular porous structure, whereas intermittent Ag film produced aligned NW.…”

Effects of the doping level in the production of silicon nanowalls by metal assisted chemical etching

“…However, the deposition of Ag particles on highly doped Si substrates in the most cases has been carried out with vacuum techniques such as sputtering or thermal evaporation [21,22], since in the case of the electroless deposition, the process time should be adjusted according to the doping concentration to achieve a uniform film of particles [23]. On the other hand, the concentration of the Ag precursor solution should also be optimized [24].…”

“…Fig.9shows a SEM micrograph of Si 0.0005-0.0007 Ω·cm etched in a solution of HF:H2O2:H2O 4:1:35 v/v/v (the optimized etchant to obtain nanowalls out of Si wafers with resistivity of[15][16][17][18][19][20][21][22][23][24][25] …”

Effects of silver nanoparticles layer thickness towards properties of black silicon fabricated by metal-assisted chemical etching for photovoltaics

“…It was concluded that Ag NPs deposition time has small influence on b-Si nanowires growth rate. Recently, Nichkalo et al investigated the role of Ag NPs morphology and AgNO 3 molarity on the size of b-Si nanowires produced by two-step MACE [12]. From their findings, it was demonstrated that the Ag NPs diameter and surface density increased with deposition time and larger Ag NPs were formed with longer deposition time, which adversely affected the morphology of the b-Si nanowires to the best of our knowledge, there has been no reported work addressing the effects of Ag NPs layer thickness towards properties of b-Si nanowires produced by two-step MACE process.…”