Robust design of gas and liquid micropumps

Richter, M.; Linnemann, R.; Woias, Peter

doi:10.1016/s0924-4247(98)00053-3

Cited by 128 publications

(78 citation statements)

References 3 publications

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“…In order to have reliable pumping, self-priming and bubble tolerance of the pump, a flexible membrane with large deflection amplitude is important [18]. The PDMS elastomer Sylgard 184 (Dow Corning Corp., Midland, Michigan, USA) has been chosen for its high flexibility and its compatibility with a hot sterilization treatment (130 • C).…”

Section: Membrane Fabrication and Final Assemblymentioning

confidence: 99%

A ball valve micropump in glass fabricated by powder blasting

Yamahata

Lacharme

Burri

et al. 2005

Sensors and Actuators B: Chemical

107

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We present the microfabrication and characterization of a ball valve micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ the use of a simple powder blasting technology for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The use of a polymer membrane with embedded permanent magnet gives rise to a large actuation stroke, making the micropump bubble-tolerant and self-priming. The micropump exhibits a backpressure as high as 280 mbar and water flow rates up to 5 mL/min thanks to the large magnetic actuation force and the use of high-efficiency ball valves. The frequency-dependent characteristics are in excellent agreement with a hydrodynamic damped oscillator model.

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Section: Membrane Fabrication and Final Assemblymentioning

confidence: 99%

A ball valve micropump in glass fabricated by powder blasting

Yamahata

Lacharme

Burri

et al. 2005

Sensors and Actuators B: Chemical

107

View full text Add to dashboard Cite

show abstract

“…Typically, for a membrane deflection of 200 lm, the compression ratio is >0.2. This high renders our pump self-priming and bubble tolerant (Richter et al 1998). The large membrane deflection amplitude and the self-priming capability of our micropump are a clear advantage offered by the use of a silicone elastomer and long range magnetic actuation forces, when compared to the use of a more rigid silicon membrane with piezoelectric actuation.…”

Section: Design and Theorymentioning

confidence: 96%

A PMMA valveless micropump using electromagnetic actuation

Yamahata

Lotto

Al-Assaf

et al. 2004

Microfluid Nanofluid

160

102

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We have fabricated and characterized a polymethylmethacrylate (PMMA) valveless micropump. The pump consists of two diffuser elements and a polydimethylsiloxane (PDMS) membrane with an integrated composite magnet made of NdFeB magnetic powder. A large-stroke membrane deflection ($200 lm) is obtained using external actuation by an electromagnet. We present a detailed analysis of the magnetic actuation force and the flow rate of the micropump. Water is pumped at flow rates of up to 400 ll/min and backpressures of up to 12 mbar. We study the frequency-dependent flow rate and determine a resonance frequency of 12 and 200 Hz for pumping of water and air, respectively. Our experiments show that the models for valveless micropumps of A. Olsson et al. (J Micromech Microeng 9:34, 1999) and L.S. Pan et al. (J Micromech Microeng 13:390, 2003) correctly predict the resonance frequency, although additional modeling of losses is necessary.

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“…Results show that the maximum net flow of the micropump is up to 8 ml/min, and the geometric size of the micropump is 20 × 16 × 2.3 mm [9]. The robust design method of the gas micropump has been studied by Richte [10].…”

Section: Shock and Vibrationmentioning

confidence: 99%

“…In the model, a unit driving voltage is applied, and the external pressure load on the actuator is zero. The volume change Δ is calculated by ANSYS 10.0, then can be obtained by (10), and = −1.5275 − 012 m 3 CJ −1 . Then the load applied on the finite element model is changed.…”

Section: Dynamic Driving Characteristics Optimizationmentioning

confidence: 99%

Optimal Design and Simulation of a Microsuction Cup Integrated with a Valveless Piezoelectric Pump for Robotics

2018

Shock and Vibration

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The traditional suction mechanism with an air pump in robotics is difficult to miniaturize. Integrating a piezoelectric pump into a suction cup is an effective method to achieve miniaturization. In this paper, a novel suction cup with a piezoelectric micropump is designed. The micropump is valveless and the suction cup is designed with a laminated structure in order to facilitate miniaturizing and manufacturing. A systematic optimization design method of the suction cup is introduced which addresses the static and dynamic driving characteristics of the piezoelectric actuator and the rectifying efficiency of diffuser/nozzle's optimization. The design is verified via simulation using an improved equivalent electric network model. Static lumped parameters in this model are calculated by the finite element method instead of the traditional analytic method, and the diffuser/nozzle's flow resistance is computed by integrating and introducing rectifying efficiency coefficient. Simulation results indicate that the suction cup can generate a stable negative pressure, and the equivalent electric network model can improve the simulation efficiency and accuracy. The maximum steady-state negative pressure of the suction cup can also be effectively improved after optimization.

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Robust design of gas and liquid micropumps

Cited by 128 publications

References 3 publications

A ball valve micropump in glass fabricated by powder blasting

A ball valve micropump in glass fabricated by powder blasting

A PMMA valveless micropump using electromagnetic actuation

Optimal Design and Simulation of a Microsuction Cup Integrated with a Valveless Piezoelectric Pump for Robotics

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