Ring waveguide resonator on surface acoustic waves

Abstract

A simple regular electrode structure for surface acoustic wave (SAW) devices is proposed. The structure consists of an interdigital transducer in the form of a ring placed on the Z cut of a hexagonal piezoelectric crystal. Finite thickness electrodes produce the known slowing effect for a SAW in comparison with this SAW on a free surface. The closed “slow” electrode region with the “fast” surrounding region forms an open waveguide resonator structure with the acoustic field concentrated in the electrode region. If the radius of the structure is large enough for a given wavelength, an acceptable level of radiation losses can be reached. The electrical admittance of such resonator does not have sidelobes.

Closed Regular Electrode Structure for SAW Resonators

“…Presumably, the regular closed electrode structure ( Fig. 1) proposed in [1] and [2] is free from such disadvantages. Therefore this structure has to be investigated.…”

“…The closed "slow" electrode region with the "fast" surrounding region forms an open waveguide resonator structure excited by the ring IDT. The structure can be termed as a ring waveguide resonator (RWR) on SAW [2]. In the present paper, as a first step towards an adequate model of RWR, a simplified theory is proposed.…”

“…Recently the authors introduced into consideration a planar ring electrode structure for surface acoustic wave (SAW) applications [1], [2]. Note that two critical structures for the development of surface acoustic wave (SAW) devices have been proposed about 40 years ago [3], [4].…”

Single-mode ring waveguide resonator on SAW

“…The ring waveguide resonator (RWR) as a new SAW device with high Q-factor has been proposed in [1]. The structure was evaluated by both the FEM and experimental measurements with an acceptable agreement of results [2], [3].…”

Development of 2" AlN Substrates Using SiC Seeds

“…A simple regular electrode structure for SAW devices has been proposed in ref. (Biryukov et al, 2007). The structure consists of an interdigital transducer in the form of a ring placed on the Z cut of a hexagonal piezoelectric crystal (Fig.…”