Rib waveguides fabricated by means of chemical etching of sol–gel SiO2:TiO2 films

Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

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“…Technological characteristics for other solutions and SiO 2 :TiO 2 films annealed in lower temperature were presented in Ref. [13].…”

Section: Rib Waveguidesmentioning

confidence: 99%

Single-Mode Rib Waveguides Fabricated by Means of Sol-Gel Method

2010

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“…In the fabrication process of strip waveguides the solution of ammonia fluoride was used with the addition of isopropanole for which etching rate was 0.052nm/s. Technological characteristics for other solutions and SiO 2 ;TiO 2 films annealed in lower temperature were presented in work [7].…”

Section: Chemical Etchingmentioning

confidence: 99%

<title>RIB waveguides fabricated by sol-gel method</title>

Karasiński

Rogoziński

2007

SPIE Proceedings

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RIB waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO 2 :TiO 2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO 2 :TiO 2 was carried out in water solutions of ammonia fluoride. The paper presents the determined technological characteristics, power distributions in the obtained strip waveguides and the results of theoretical analysis.

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“…One of the most commonly applied systems in the sol-gel technology is two-component system SiO2:TiO2. By an appropriate selection of components, we can produce films of the refractive index which is within the range from the refractive index of pure silica (1.4) to the refractive index of titania(2.3) [8]. The films of low refractive indexes afford the possibility to produce planar systems which are compatible with telecommunication optical waveguide fibers.…”

Section: Introductionmentioning

confidence: 99%