2016
DOI: 10.1080/10408347.2016.1150153
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Review on Micro-Gas Analyzer Systems: Feasibility, Separations and Applications

Abstract: Over 30 years, portable systems for fast and reliable gas analysis are at the core of both academic and industrial research. Miniaturized systems can be helpful in several domains. The way to make it possible is to miniaturize the whole gas chromatograph. Micro-system conception by etching silicon channel is well known. The main objective is to obtain similar or superior efficiencies to those obtained from laboratory chromatographs. However, stationary phase coatings on silicon surface and micro-detector conce… Show more

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Cited by 39 publications
(20 citation statements)
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“…Terry and Herman [ 220 ] first reported in 1979 a micro-GC (μGC) that was fabricated on a silicon (Si) wafer. Since then, several μGC systems have been described for field use with rapid response, small footprint, low-cost, low-power, light weight, battery powered, possessing high resolution with narrow columns having low dead volume and improved sensitivity even with small sample volumes [ 221 , 222 ]. Monolithic integration in Si has enabled system-level miniaturization, low-cost fabrication and assembly, with simpler and smaller fluidic connections [ 223 ] ( Figure 20 ).…”
Section: Tools and Techniques For Vocs Collection And Detectionmentioning
confidence: 99%
“…Terry and Herman [ 220 ] first reported in 1979 a micro-GC (μGC) that was fabricated on a silicon (Si) wafer. Since then, several μGC systems have been described for field use with rapid response, small footprint, low-cost, low-power, light weight, battery powered, possessing high resolution with narrow columns having low dead volume and improved sensitivity even with small sample volumes [ 221 , 222 ]. Monolithic integration in Si has enabled system-level miniaturization, low-cost fabrication and assembly, with simpler and smaller fluidic connections [ 223 ] ( Figure 20 ).…”
Section: Tools and Techniques For Vocs Collection And Detectionmentioning
confidence: 99%
“…On-chip technologies enable the creation of fast, precise, simple, portable, low-cost gas sensing platforms with wide application areas, including air quality monitoring [ 127 , 128 ]. The most widely known electrochemical sensing principles, based on charge generation or conductivity changes, are already available on the market and implemented as on-chip products [ 129 ].…”
Section: Emerging On-chip Technologies For the Air Quality Measurementioning
confidence: 99%
“…Microgas chromatographs (µGC) try to incorporate all the key components employed in large-scale systems in a small and compact device, exploiting the use of new micromachining techniques. However, despite of the high performance showcased by these devices in some applications, they still present some concerns, such as complicated and tedious configurations, short lifetime, high-power consumptions, and high costs of implementation [ 25 , 26 ]. The price of current commercially available µGC devices range from 10 to 100 k€, which still limits their practical implementation in many applications [ 27 ].…”
Section: Introductionmentioning
confidence: 99%