Review of Cathodic Arc Deposition for Preparing Droplet-Free Thin Films

“…One of the two gratings was coated with DLC film by filtered arc deposition. [9] The thickness of the DLC layer on the Ni grating was measured to be approximately 26 nm by a 3-dimensional profilometer (UA-3P, Panasonic). The diffraction efficiency of the Ni grating before DLC coating had been measured in advance.…”

Section: Fabrication and Evaluation Of Dlc/ni Gratingmentioning

confidence: 99%

Experimental evaluation of enhancement of diffraction efficiency by overcoating diamond-like carbon (DLC) on soft x-ray laminar-type gratings

Imazono

Koike

Nagano

et al. 2016

AIP Conference Proceedings

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“…In FAD methods, a solid material is used as the cathode, which is an evaporation source. The evaporated cathode material has a high ion energy and ionization ratio 19 . In addition, this method uses a filter coil to separate charge particles and droplets, which are the cause of the decrease in film properties 19,20,21,22 .…”

Section: Introductionmentioning

confidence: 99%

Improvement of adhesion of hydrogen-free DLC film by employing an interlayer of tungsten carbide

Isono

Tanimoto

Iijima³

et al. 2018

AIP Conference Proceedings

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Abstract. Materials with poor adhesion present a problem for the application of diamond-like carbon (DLC) films. As a method for solving this problem, there is a technique that deposits an interlayer of metal between the DLC film and substrate. A tungsten carbide film (W-C film) is used as the interlayer. In this study, the effect of introducing the W-C interlayer on the adhesion of the DLC film was investigated. The W-C films were deposited using two types of cemented tungsten carbides (WCs) as the cathode, one containing Co (WC-Co) and the other containing Ti (WC-Ti), as a binder for forming the cathode shape. It is necessary to control the film thickness of the interlayer to introduce the interlayer to the DLC film. The film thickness control of W-C films became possible by using a discharge counter. DLC films were deposited using a bias voltage of -100 V. The film thicknesses of the W-C interlayer and DLC film at the time of investigating adhesion were 30 nm and 300 nm, respectively. The result of the tape-peeling test showed that the adhesion of the DLC film was improved by employing the W-C interlayer. In addition, adhesion was further improved by removing the oxide layer on the intermediate layer.

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Review of Cathodic Arc Deposition for Preparing Droplet-Free Thin Films

Cited by 85 publications

References 48 publications

60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications

60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications

Experimental evaluation of enhancement of diffraction efficiency by overcoating diamond-like carbon (DLC) on soft x-ray laminar-type gratings

Improvement of adhesion of hydrogen-free DLC film by employing an interlayer of tungsten carbide

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