Review of atomic layer deposition process, application and modeling tools

Kunene, Thokozani Justin; Tartibu, Lagouge K.; Ukoba, Kingsley; Jen, Tien‐Chien

doi:10.1016/j.matpr.2022.02.094

Cited by 25 publications

(17 citation statements)

References 99 publications

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“…Mechanistic modeling studies focused on ALD coating have been collated [195,207]. Similar mechanistic models can be developed for predicting coating quality of CAM particles during the post-processing step.…”

Section: Particle Coatingmentioning

confidence: 99%

Status and outlook for lithium-ion battery cathode material synthesis and the application of mechanistic modeling

Pardikar

Entwistle

et al. 2023

J. Phys. Energy

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This work reviews different techniques available for the synthesis and modification of cathodeactive material particles used in Li-ion batteries. The synthesis techniques are analyzed in termsof processes involved and product particle structure. The knowledge gap in the process-particlestructure relationship is identified. Many of these processes are employed in other similarindustries; hence, parallel insights and knowledge transfer can be applied to battery materials.Here, we discuss examples of applications of different mechanistic models outside the batteryliterature and identify similar potential applications for the synthesis of cathode active materials.We propose that the widespread implementation of such mechanistic models will increase theunderstanding of the process-particle structure relationship. Such understanding will providebetter control over the cathode active material synthesis technique and open doors to the precisetailoring of product particle morphologies favorable for enhanced electrochemical performance.

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Section: Particle Coatingmentioning

confidence: 99%

Status and outlook for lithium-ion battery cathode material synthesis and the application of mechanistic modeling

Pardikar

Entwistle

et al. 2023

J. Phys. Energy

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“…ease of reduction or thermolysis), relative stability, and preparation scalability, along with other physicochemical properties such as volatility or solubility in specific solvents to name but a few. 6,7 Overall, this decision boils down to choosing a suitable set of ligands that at the same time endow their stability and ensure that they can be readily removed to generate the desired (nano-)material, free of organic or other contaminants (e.g., halides or residual carbonaceous species). Of various synthetic methodologies interested in generating clean materials, Surface Organometallic Chemistry (SOMC), has emerged as a privileged approach to provide better-defined catalytic materials such as supported nanoparticles with tailored interfaces and compositions.…”

Section: Introductionmentioning

confidence: 99%

Group 10 Metal Allyl Amidinates: A Family of Readily Accessible and Stable Molecular Precursors to Generate Supported Nanoparticles

Ehinger

Zhou

Candrian

et al. 2023

Preprint

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The synthesis of well-defined materials as model systems for catalysis and related fields is an important pillar in the understanding of catalytic processes at a molecular level. Various approaches employing organometallic precursors have been developed and established to make monodispersed supported nanoparticles, nanocrystals, and films. Using rational design principles, a new family of precursors based on group 10 metals suitable for the generation of small and monodispersed nanoparticles on metal oxides has been developed. Particle formation on SiO2 and Al2O3 supports is demonstrated, as well as the potential in the synthesis of bimetallic catalyst materials exemplified with a PdGa/SiO2 system capable in the hydrogenation of CO2 to methanol. In addition to surface organometallic chemistry (SOMC), it is envisioned that these precursors could also be employed in related applications such as atomic layer deposition, due to their inherent volatility and relative thermal stability.

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“…The generation of metallic nanoparticles, nanocrystals, and films has been a highly dynamic research area due to their uses and developments for various applications, including imaging, sensing to catalysis, etc. − Obtaining the desired metallic materials, free of contaminants, is essential for many applications. In that context, the use of organometallic or metalorganic precursors has shown to be advantageous. , Key criteria for choosing precursors include, in particular, specific reactivity (e.g., ease of reduction or thermolysis), relative stability, and preparation scalability, along with other physicochemical properties, such as volatility or solubility in specific solvents, to name but a few. , Overall, this decision boils down to choosing a suitable set of ligands that, at the same time, endow their stability and ensure that they can be readily removed to generate the desired (nano-)material, free of organic or other contaminants (e.g., halides or residual carbonaceous species). Of various synthetic methodologies interested in generating clean materials, surface organometallic chemistry (SOMC) has emerged as a privileged approach to provide better-defined catalytic materials, such as supported nanoparticles with tailored interfaces and compositions (Figure a). , SOMC enables the interrogation of promoter effects and the role of interfacial Lewis acidic sites and alloying in heterogeneous catalysis. ,− For SOMC, similar to atomic layer deposition (ALD), one important criterion is to identify precursors that can react selectively with surface functionalities, in particular, surface OH groups.…”

Section: Introductionmentioning

confidence: 99%

Group 10 Metal Allyl Amidinates: A Family of Readily Accessible and Stable Molecular Precursors to Generate Supported Nanoparticles

Ehinger,

Zhou,

Candrian

et al. 2023

JACS Au

View full text Add to dashboard Cite

The synthesis of well-defined materials as model systems for catalysis and related fields is an important pillar in the understanding of catalytic processes at a molecular level. Various approaches employing organometallic precursors have been developed and established to make monodispersed supported nanoparticles, nanocrystals, and films. Using rational design principles, a new family of precursors based on group 10 metals suitable for the generation of small and monodispersed nanoparticles on metal oxides has been developed. Particle formation on SiO 2 and Al 2 O 3 supports is demonstrated, as well as the potential in the synthesis of bimetallic catalyst materials, exemplified by a PdGa/SiO 2 system capable of hydrogenation of CO 2 to methanol. In addition to surface organometallic chemistry (SOMC), it is envisioned that these precursors could also be employed in related applications, such as atomic layer deposition, due to their inherent volatility and relative thermal stability.

show abstract

Review of atomic layer deposition process, application and modeling tools

Cited by 25 publications

References 99 publications

Status and outlook for lithium-ion battery cathode material synthesis and the application of mechanistic modeling

Status and outlook for lithium-ion battery cathode material synthesis and the application of mechanistic modeling

Group 10 Metal Allyl Amidinates: A Family of Readily Accessible and Stable Molecular Precursors to Generate Supported Nanoparticles

Group 10 Metal Allyl Amidinates: A Family of Readily Accessible and Stable Molecular Precursors to Generate Supported Nanoparticles

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