Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method

Yu, Yongping; Chen, Lihui; Wang, Zhigang; Liu, Guoji

doi:10.1007/s42417-020-00204-7

Cited by 5 publications

(2 citation statements)

References 38 publications

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“…which is completely analogous to (11) achieved in [45]. In addition, (74) is still analogous to (3) in [49] where a MEMS switch with perforated serpentine (Au) was designed, sim-ulated, fabricated and characterized.…”

Section: Concerning the Pull-in Voltage And Electrostatic Pressurementioning

confidence: 68%

“…Today, these devices are considered "intelligent" because they combine electrical, electronic, mechanical, optical and other behaviors, managing highly complex industrial processes [4][5][6][7][8][9]. Among these, electrostatic MEMS with parallel metal plates are widely used devices in the industry, as they are easy to construct and exhibit high versatility [1,10,11]. Today, theoretical modeling of these devices is so advanced as to evaluate any correspondences between mechanical stresses of the deformable elements and the intended use of the device without neglecting the possibility of carrying out functionality tests in operation, which would normally require the destruction of the device itself [12,13].…”

Section: Introductionmentioning

confidence: 99%

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Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field

et al. 2022

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Global existence and uniqueness conditions for a dimensionless fourth-order integro-differential model for an electrostatic-elastic MEMS device with parallel plates and fringing field contribution were recently achieved by the Authors. Moving from this work, once the dielectric profile of the deformable plate according with experimental setups has been assigned, some technical conditions of applicability for the intended use of the device as well as the mechanical tension of the deformable plate are presented and discussed. Then, highlighting the link between the fringing field and the electrostatic force, finite differences were exploited for recovering the deformable plate profile according both global existence and uniqueness conditions. Moreover, the influence of the electro-mechanical properties of the deformable plate on both the numerical approach and on the intended uses of the device is discussed, comparing the results with experimental setups regarding pull-in voltage and electrostatic pressure.

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Section: Concerning the Pull-in Voltage And Electrostatic Pressurementioning

confidence: 68%