1997
DOI: 10.1063/1.118816
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Resonant tunneling through a self-assembled Si quantum dot

Abstract: Nanometer-scale Si quantum dots have been spontaneously fabricated on SiO2 by controlling the early stages of low-pressure chemical vapor deposition from pure silane. The tunneling current through Au/1 nm-SiO2/a single Si quantum dot/1 nm-SiO2/n+-Si(100) double-barrier structures has exhibited the clear current bump or negative conductance at 300 K with a peak current to valley ratio as high as 10.

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Cited by 103 publications
(42 citation statements)
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“…This, and the fact that we do not have evidence here (at room temperature) for the effect of quantum confinement on the transport, suggests (in view of our CS data), that the charging rather than resonant tunneling is the dominant inhibitor to the transport. This conclusion is further supported by considering the many works that are consistent with that picture and the fact that only very few works suggested the observation of resonant tunneling in Si QDs [30,31]. In that context an extremely important observation in the present work is that our I-t relaxation characteristics and our I-V hysteresis results on the present 3D QDs systems are very similar to results observed by others for 1D [32] and 2D [20,21] arrays of QDs.…”
Section: Discussionsupporting
confidence: 93%
“…This, and the fact that we do not have evidence here (at room temperature) for the effect of quantum confinement on the transport, suggests (in view of our CS data), that the charging rather than resonant tunneling is the dominant inhibitor to the transport. This conclusion is further supported by considering the many works that are consistent with that picture and the fact that only very few works suggested the observation of resonant tunneling in Si QDs [30,31]. In that context an extremely important observation in the present work is that our I-t relaxation characteristics and our I-V hysteresis results on the present 3D QDs systems are very similar to results observed by others for 1D [32] and 2D [20,21] arrays of QDs.…”
Section: Discussionsupporting
confidence: 93%
“…4) Silicon on insulator (SOI) 5) was first used for studying RT in Si, and negative differential conductance (NDC) was observed at low temperature. RT through a two-dimensionally confined structure has also been reported recently using a nanocrystalline silicon quantum disc, 6) and NDC has been observed at room temperature. Quantum-dot-based IC technology is predicted to become the most basic component of ultra-scaled semiconductor devices.…”
Section: Introductionmentioning
confidence: 90%
“…Negative differential conductance (NDC) in Si double barrier structure due to resonant tunneling has been observed [5], [6]. Room temperature NDC in a self-assembled Si quantum dot has also been reported [7].…”
Section: Introductionmentioning
confidence: 94%