Resonant Controller Design for a Piezoelectric Tube Scanner: A Mixed Negative-Imaginary and Small-Gain Approach

Das, Sajal K.; Pota, H. R.; Petersen, Ian R.

doi:10.1109/tcst.2013.2297375

Cited by 69 publications

(25 citation statements)

References 22 publications

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“…Furthermore, the oscillations regrettably affect the final precision of the tasks. For instance, during an image scanning with an atomic force microscopy, the oscillations of the piezotube actuator introduce a deformation to the final image [6,24,25]. Additionally, piezotubes also exhibit strong cross-couplings between the axes which contribute to more performances losses [26,27].…”

Section: Presentation Of the Experimental Setupmentioning

confidence: 99%

Multi-Mode Vibration Suppression in MIMO Systems by Extending the Zero Placement Input Shaping Technique: Applications to a 3-DOF Piezoelectric Tube Actuator

Al-Hamidi

Rakotondrabe

2016

Actuators

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Piezoelectric tube actuators are extensively used in scanning probe microscopes to provide dynamic scanning motions in open-loop operations. Furthermore, they are employed as micropositioners due to their high bandwidth, high resolution and ease of excitation. However, these piezoelectric micropositioners exhibit badly damped vibrations that occur when the input excites the dynamic response, which tends to degrade positioning accuracy and performance. This paper deals with vibrations' feedforward control of a multi-degrees of freedom (DOF) piezoelectric micropositioner in order to damp the vibrations in the direct axes and to reduce the cross-couplings. The novelty in this paper relative to the existing vibrations feedforward controls is the simplicity in design approach, the minimal number of shaper impulses for each input required to damp all modes of vibration at each output, and the account for the strong cross-couplings which only occur in multi-DOF cases. A generalization to a multiple degrees of freedom actuator is first proposed. Then simulation runs on a 3-DOF piezoelectric tube micropositioner have been effectuated to demonstrate the efficiency of the proposed method. Finally, experimental tests were carried out to validate and to confirm the predicted simulation.

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Section: Presentation Of the Experimental Setupmentioning

confidence: 99%

Multi-Mode Vibration Suppression in MIMO Systems by Extending the Zero Placement Input Shaping Technique: Applications to a 3-DOF Piezoelectric Tube Actuator

Al-Hamidi

Rakotondrabe

2016

Actuators

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“…The design of the VFC is based on the mixed negative-imaginary and small-gain approach (Theorem 1 of [30]) introduced in [30]. A detail of the design process of the MIMO VFC for the PTS is given in [31]. The values of the VFC parameters obtained in the designed process is as follows: ω v =925.8021…”

Section: Controller Designmentioning

confidence: 99%

A MIMO controller design for damping, tracking, and cross coupling reduction of nanopositioners

Das

Pota

Petersen

2013

2013 Australian Control Conference

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This paper presents the design and implementation of a multi-input multi-output (MIMO) controller using a resonant controller, an integral controller, and a velocity feedback controller for damping, tracking and cross coupling reduction of a nanopositioner used in most of the scanning probe microscopes (SPMs). The MIMO dynamics identification of the system are done by using measured data and the design of the controller is based on to achieve large bandwidth and small cross coupling effects between the axes of the nanopositioner. The controller design presented in this paper is able to achieve a bandwidth close to the first resonance frequency of a nanopositioner which is five times greater than the bandwidth that can achieved by using a standard integral controller. Experimental images at scanning rates of 62.5 Hz and 125 Hz obtained by using the proposed controller and the built-in proportional-integral (PI) controller in a SPM are given to illustrate the effectiveness of the proposed controller.

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“…The design of VFC in this paper is done by using a mixed negative-imaginary and small-gain approach (see Theorem 1 of [26]) to guarantee the finite-gain stability of the closedloop system. A detail of the design process of the VFC using mixed negative-imaginary and small-gain approach is presented in [27]. The VFC is designed both for the Xand Y-axis of the PTS.…”

Section: Controller Designmentioning

confidence: 99%

A new robust damping and tracking controller for high speed nanopositioning

Das

Pota

Petersen

2013

2013 Australian Control Conference

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This paper presents the design and implementation of a novel control architecture with a resonant controller, an integral controller, and a velocity feedback controller to improve the high speed imaging performance of a nanopositioning stage, piezoelectric tube scanner (PTS) used in most of the commercial atomic force microscopes (AFMs). The design of the controller is done by considering the lateral and longitudinal axes of the PTS as an independent single-input single-output (SISO) system. The controller proposed in this paper is able to achieve a bandwidth close to the first resonance frequency of the PTS and the controller is robust against the changes in resonance frequency of the scanner due to the load change on the scanner. The performance of the proposed controller is illustrated by comparing with an integral controller and it is shown that the bandwidth increased by the proposed controller is five times greater than the bandwidth that can be achieved by using the integral controller in a commercial scanner. Experimental images with the open-loop, closed-loop and built-in AFM proportional integral controller are presented at scanning rates of 15.62 Hz, 31.25 Hz, 62.5 Hz, and 125 Hz to demonstrate the advantage of the proposed controller.

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Resonant Controller Design for a Piezoelectric Tube Scanner: A Mixed Negative-Imaginary and Small-Gain Approach

Cited by 69 publications

References 22 publications

Multi-Mode Vibration Suppression in MIMO Systems by Extending the Zero Placement Input Shaping Technique: Applications to a 3-DOF Piezoelectric Tube Actuator

Multi-Mode Vibration Suppression in MIMO Systems by Extending the Zero Placement Input Shaping Technique: Applications to a 3-DOF Piezoelectric Tube Actuator

A MIMO controller design for damping, tracking, and cross coupling reduction of nanopositioners

A new robust damping and tracking controller for high speed nanopositioning

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