Resonant cavity integrated absorber structure for capacitive infrared detectors

Kwon, Il-Woong; Kim, Dong-Soo; Kim, Woo Young; Hwang, Chi-Ho; Lee, Hee Chul

doi:10.1049/el.2011.0639

Cited by 1 publication

(1 citation statement)

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“…In the years between 2007 and 2011 the research group from the Korea Advanced Institute of Science and Technol− ogy, Daejeon has reported some minor activities in the theo− retical analysis of capacitive readout IR micromirrors [43][44][45]. No thermal imagery has been presented.…”

Section: Development Of a Microcantilever Based Thermal Imager Using mentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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We present a state-of-the-art overview of microthermomechanical infrared sensor technology. The working principle of this sensor is based on a bi-material actuated micromechanical deflection, generated by an induced temperature rise due to incident infrared radiation absorption. In order to generate a thermal image the thermomechanical deflections of the freestanding microstructures are read by either capacitive, piezoresistive or optical means. Research and development activities in this field began in the early 1990s. The development of this technology within the last 20 years has resulted in innovations such as uncooled multiband infrared detection, high-speed infrared sensing and uncooled THz imaging. This paper outlines representative milestones of this technology and analyses important results of notable groups. Significant activities on capacitive and optical readout techniques of thermomechanical infrared arrays are presented. Furthermore the advantages of microthermomechanical infrared sensors over current well-established uncooled infrared technologies are summarized. In conclusion the latest developments of this technology offer a highly potential solution for a variety of important energy-saving, safety and security applications.

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Section: Development Of a Microcantilever Based Thermal Imager Using mentioning

confidence: 99%