1962
DOI: 10.1063/1.1702469
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Resonances of a Microwave Cavity Partially Filled with a Plasma

Abstract: The resonant behavior of a cylindrical microwave cavity partially filled with a cold plasma of arbitrarily large density is studied theoretically and experimentally. Curves showing the resonant frequencies as functions of the plasma density are given for the lower order modes. The modes are generally not pure TE or TM modes but are of hybrid character. In addition to the modes that are related to those of the empty cavity, there is a class of modes of surface wave character that do not exist in the empty cavit… Show more

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Cited by 103 publications
(29 citation statements)
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“…We can see from (6) and (7) that in order to use this method effectively we need information on the spatial electron density profile. If we assume that the electron density profile has cylindrical symmetry and the r and z dependences can be separated, n,, can be written as n,.…”
Section: Theorymentioning
confidence: 99%
“…We can see from (6) and (7) that in order to use this method effectively we need information on the spatial electron density profile. If we assume that the electron density profile has cylindrical symmetry and the r and z dependences can be separated, n,, can be written as n,.…”
Section: Theorymentioning
confidence: 99%
“…It was first described in 1970 by Lisitano and coworkers [216], who built a very similar discharge source for gases, but to this author's knowledge this is the first time such a structure has been coupled to the exit orifice of an effusion cell. Although the cavity may be resonant prior to ignition of the plasma, its modes are significantly perturbed by the plasma itself, a problem previously addressed analytically by Agdur and Enander [217].…”
Section: Source Designmentioning
confidence: 94%
“…48 However, with the emergence of microplasmas, the use of this diagnostic has been mostly overlooked. The microwave cavity method may be an ideal diagnostic for measuring the properties of microplasmas, since a microwave cavity can be made into almost any arbitrary shape and a number of electromagnetic modes can be excited.…”
Section: A Microwave Cavity Measurementsmentioning
confidence: 99%