Abstract:This paper illustrated the beauty of AFP nanoprobing as the critical failure analysis tool in resolving the one-time programmable (OTP) non-volatile memory data retention failures through electrical simulation in wafer fabrication. Layout analysis, electrical simulation using Meilke’s method, UV erase methodology (to differentiate between mobile ion Meilke’s method contamination and charge trap centers) and a few other FA approaches were employed to determine the different root causes in the three OTP failure … Show more
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