2012
DOI: 10.1016/j.phpro.2012.03.075
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Resistive-type Humidity Sensor Based on CA-NH4BF4-PEG600 Thin Films

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Cited by 8 publications
(5 citation statements)
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“…This refers to parameters such as the layer thickness (or the polymer mass per surface area), lateral homogeneity and wettability, and the dependence of these on process parameters. Further, PEG and PEG-containing layers have been used in a variety of humidity sensors, based on dimensional, electrical, mass, or refractive index changes upon swelling, and there is an interest in the ability to tune the polymer properties to optimize the sensing performance to different applications. Hence, control of the water uptake characteristics of PEG-based polymers supports the informed and systematic development of such sensors.…”
Section: Introductionmentioning
confidence: 99%
“…This refers to parameters such as the layer thickness (or the polymer mass per surface area), lateral homogeneity and wettability, and the dependence of these on process parameters. Further, PEG and PEG-containing layers have been used in a variety of humidity sensors, based on dimensional, electrical, mass, or refractive index changes upon swelling, and there is an interest in the ability to tune the polymer properties to optimize the sensing performance to different applications. Hence, control of the water uptake characteristics of PEG-based polymers supports the informed and systematic development of such sensors.…”
Section: Introductionmentioning
confidence: 99%
“…Various relative humidity sensing techniques have been reported for airborne environmental conditions, including capacitive, resistive, quartz crystal microbalance (QCM), electrochemical, surface acoustic wave (SAW), optical fiber, and field-effect transistor sensors. Capacitive humidity sensors have been widely utilized because of their high sensitivity and accuracy, and a wide RH detection range . However, process complexity of the sensor structure and high cost caused by complicated signal-processing electronics at the far end of the sensor still remain as challenges to be overcome.…”
mentioning
confidence: 99%
“…Exact and long haul RH estimations will empower a quantitative relationship between admissible H 2 S in sewer air and worthy erosion rates ≤0.5 mm/year. Humidity sensors were realized in different forms constituting capacitive [168], resistive [169,170], electrical resonant [171] and mechanical resonant devices [172]. For measuring humidity, sensitive materials range from polymers to porous ceramics, porous silicon and electrolyte have been used.…”
Section: Fiber Optic Humidity Sensorsmentioning
confidence: 99%
“…Conventional methods for humidity sensing include a mechanical hygrometer [173], chilled mirror hygrometer [174], wet and dry bulb psychrometer [175], Infra Red (IR) optical absorption hygrometer [176] and electronic hygrometer [170]. In a mechanical hygrometer, the humidity is measured with the displacement of the material through strain gauges.…”
Section: Fiber Optic Humidity Sensorsmentioning
confidence: 99%