2011
DOI: 10.3390/s110403439
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Resistive Oxygen Gas Sensors for Harsh Environments

Abstract: Resistive oxygen sensors are an inexpensive alternative to the classical potentiometric zirconia oxygen sensor, especially for use in harsh environments and at temperatures of several hundred °C or even higher. This device-oriented paper gives a historical overview on the development of these sensor materials. It focuses especially on approaches to obtain a temperature independent behavior. It is shown that although in the past 40 years there have always been several research groups working concurrently with r… Show more

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Cited by 96 publications
(57 citation statements)
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“…Sensors for toxic and flammable gases have attracted much attention due to the growing concern about environmental protection and safety [1][2][3][4]. Metal-oxide semiconductors (MOS) such as In 2 O 3 [5,6], WO 3 [7,8], and SnO 2 [9][10][11] have been widely chosen as sensing materials in the last decades for their high sensitivity to target gases and simplicity in fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…Sensors for toxic and flammable gases have attracted much attention due to the growing concern about environmental protection and safety [1][2][3][4]. Metal-oxide semiconductors (MOS) such as In 2 O 3 [5,6], WO 3 [7,8], and SnO 2 [9][10][11] have been widely chosen as sensing materials in the last decades for their high sensitivity to target gases and simplicity in fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5] There is a growing research focus on this material for applications in thin-film capacitors, resistive random access memory, gas sensing, and high electron mobility two dimensional electron gas heterostructures. [6][7][8][9] It is also commonly used as a growth substrate for superconductors and other oxide thin films. 7,10 Ceramic single-crystal STO, commonly used for dielectric applications, has a significant number of background impurities present at levels of parts per million or higher.…”
mentioning
confidence: 99%
“…Semiconductor metal oxide-based gas sensors, used as a low cost alternative for gas detection devices, have attracted much attention because of their importance in maintaining and controlling air quality in various atmospheres [1][2][3]. However, they suffered from limitations in sensitivity and selectivity compared to more expensive alternatives.…”
Section: Introductionmentioning
confidence: 99%