Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas

Myasoedova, Tatiana N.; Mikhailova, T. S.; Yalovega, G. E.; Plugotarenko, Nina K.

doi:10.3390/chemosensors6040067

Cited by 12 publications

(7 citation statements)

References 38 publications

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“…Moreover, the response and recovery time of the sensor devices were found to be 10 and 13 s, respectively. Last but not least, the valuable contribution of Myasoedova et al should be noted [3], in which SiO 2 ZrO 2 thin films were used to detect high concentrations of NO 2 gas at a low operating temperature (25 • C). These films were prepared by the sol-gel technique, and their resistance was shown to be dependent on the amount of NO 2 impurities in the air.…”

Section: The Special Issuementioning

confidence: 99%

Thin Film-Based Sensors

Raposo

Ribeiro

2019

Chemosensors

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Section: The Special Issuementioning

confidence: 99%

Thin Film-Based Sensors

Raposo

Ribeiro

2019

Chemosensors

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“…The measurement setup used for the investigation of the electrical and gas sensor characteristics was reported previously [3]. The setup consisted of a test chamber with a substrate holder, heating element, and Pt-thermocouple, control, supply, and measurement electronics (voltmeter and temperature controller).…”

Section: Electrical and Gas Sensor Experimentsmentioning

confidence: 99%

“…The interest in solid-state gas sensors is due to their numerous advantages, like their small size, high sensitivity in detecting very low concentrations of a wide range of gaseous chemical compounds, the possibility of online operation, and, due to possible batch production, low cost [1,2]. Solid-state gas sensors based on metal oxides have been widely investigated over the last 20 years [3,4]. However, solid-state sensors usually display poor selectivity for the measured gas species, high sensitivity to humidity, and instability, demonstrated through drift in the baseline signal or in the sensor response [2].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

et al. 2019

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In this study, we designed two types of gas-sensor chips with silicon–carbon film, doped with CuO, as the sensitive layer. The first type of gas-sensor chip consists of an Al2O3 substrate with a conductive chromium sublayer of ~10 nm thickness and 200 Ω/□ surface resistance, deposited by magnetron sputtering. The second type was fabricated via the electrochemical deposition of a silicon–carbon film onto a dielectric substrate with copper electrodes formed by photoelectrochemical etching. The gas sensors are sensitive to the presence of CO and CH4 impurities in the air at operating temperatures above 150 °C, and demonstrated p- (type-1) and n-type (type-2) conductivity. The type-1 gas sensor showed fast response and recovery time but low sensitivity, while the type-2 sensor was characterized by high sensitivity but longer response and recovery time. The silicon–carbon films were characterized by the presence of the hexagonal 6H SiC polytype with the impurities of the rhombohedral 15 R SiC phase. XRD analysis revealed the presence of a CuO phase.

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“…Several advantages can be expected in the development of sensitive gas sensors. In the context, of the sensors controlling the impurities via stoichiometry, low-temperature fabrication should provide better control over the structural morphology [6][7][8][9][10][11][12]. These factors contribute to low conductivity and high purity for excellent sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Sol-Gel Materials for Electrochemical Applications: Recent Advances

2022

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This review article emphases on the modern approaches to the types of sol-gel materials that are beneficial for electrochemistry, monitored by a report of recent advances in the numerous fields of sol-gel electrochemistry. Modified electrodes for sensors and supercapacitors as well as anti-corrosion are described. Sol-gel synthesis expands the capabilities of technologists to obtain highly porous, homogeneous, and hybrid thin-film materials for supercapacitor electrode application. The widespread materials are transition metal oxides, but due to their low conductivity, they greatly impede the rate capability of electrochemical supercapacitors. The way to optimize their properties is the production of complex oxides or different composites. Among the new materials, a special place is occupied by perovskites and materials with an olivine-type structure, which can be easily obtained by the sol-gel method. The sol-gel coating process has demonstrated excellent chemical stability to advance the corrosion resistance of the various metal alloy substrates. Furthermore, the sol-gel process is a user-friendly technique for applying a hybrid sol-gel coating to provide corrosion resistance. The hybrid sol-gel coating technique is the most attractive, easy to prepare at a lower temperature, and has shown the potential to swap Cr-based coatings. The hybrid sol-gel coating has exhibited promising properties of adherent and uses chemically inert to enhance the corrosion resistance of the metal and alloys. Hence, this review article emphases on the recent advances and approaches in the sol-gel coating processes that influence the belongings of its hybrid sol-gel coating for protecting metal substrates and their alloys from corrosion. In addition, the author discusses the current problem and challenges of hybrid anti-corrosion sol-gel coatings. Metal oxides and composites based on them are actively used to create electrochemical sensors. They synthesized, including the anhydrous and citrate sol-gel methods. Such materials are widely used as glucose biosensors and harmful gas sensors.

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Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas

Cited by 12 publications

References 38 publications

Thin Film-Based Sensors

Thin Film-Based Sensors

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

Sol-Gel Materials for Electrochemical Applications: Recent Advances

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