2022
DOI: 10.1088/1361-6528/ac4664
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Residue-free suspended graphene transferred by perforated template

Abstract: A residue-free transfer method for graphene is proposed in this study, especially for the fabrication of suspended structures. Using perforated polymer templates, graphene can be precisely transferred onto the specific position in the perforated target SiO2/Si substrates without the need for polymer removal and the subsequent thermal annealing process. The surface of the transferred graphene by the proposed method was analyzed and corroborated via Raman spectroscopy, Fourier transform infrared spectroscopy, tr… Show more

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Cited by 2 publications
(2 citation statements)
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References 45 publications
(52 reference statements)
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“…Although significant progress has been made in the past few years, there are still many areas that require further exploration and opportunities for future research. One key challenge is the development of new fabrication techniques that can produce large-scale suspended 2D materials with high quality and reproducibility [56,74,132]. The optimization of nanofabrication processes for suspended 2D materials can provide a great platform for future-generation optoelectronic devices.…”
Section: Perspective and Conclusionmentioning
confidence: 99%
“…Although significant progress has been made in the past few years, there are still many areas that require further exploration and opportunities for future research. One key challenge is the development of new fabrication techniques that can produce large-scale suspended 2D materials with high quality and reproducibility [56,74,132]. The optimization of nanofabrication processes for suspended 2D materials can provide a great platform for future-generation optoelectronic devices.…”
Section: Perspective and Conclusionmentioning
confidence: 99%
“…For preparing 2D material heterostructures, each layer of 2D material is stacked using micro-transfer systems in air, causing unintended residues in the stacked layer heterointerfaces [10][11][12][13][14][15][16]. Such residues are commonly referred to as bubbles.…”
Section: Introductionmentioning
confidence: 99%