Research on Temperature Zero Drift of SiC Piezoresistive Pressure Sensor Based on Asymmetric Wheatstone Bridge

Tian, Baohua; Shang, Haiping; Wang, Weibing

doi:10.1007/s12633-021-01330-x

Cited by 13 publications

(8 citation statements)

References 27 publications

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“…Under the supply voltage of 5 V, a resistance difference of 10 Ω can lead to a zero-point output drift of 13.1 mV. Notably, the SiO 2 insulating layer may also cause this phenomenon after high-temperature annealing at 1000 °C, due to residual tensile stress [ 33 , 34 , 35 ].

…”

Section: Resultsmentioning

confidence: 99%

“…Under the supply voltage of 5 V, a resistance difference of 10 Ω can lead to a zero-point output drift of 13.1 mV. Notably, the SiO 2 insulating layer may also cause this phenomenon after high-temperature annealing at 1000 • C, due to residual tensile stress [33][34][35]. A finite element simulation of the characteristic frequency of the sensor was carried out, and the results are reported in Figure 12a.…”

Section: Resultsmentioning

confidence: 99%

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Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

et al. 2022

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Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To address these issues, this paper proposes a design method for a MEMS piezoresistive pressure sensor, and the fabricated sensor is evaluated in a series of systematic dynamic environmental adaptability tests. After testing, the output sensitivity of the sensor chip was 9.21 mV∙bar−1, while the nonlinearity was 0.069% FSS. The sensor overreacts to rapidly changing pressure environments and can withstand acceleration shocks of up to 20× g. In addition, the sensor is capable of providing normal output over the vibration frequency range of 0–5000 Hz with a temperature coefficient sensitivity of −0.30% FSS °C−1 over the temperature range of 0–80 °C. Our proposed sensor can play a key role in applications with wide pressure ranges, high-frequency vibrations, and high acceleration shocks, as well as guide MEMS-based pressure sensors in high pressure ranges and complex environmental adaptability in their design.

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…”

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

et al. 2022

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“…Owing to the presence of zero drift in the differential pressure sensor, when the input signal of the amplifier circuit is zero (in this experiment, it corresponds to the static state of the fluid), because of the influence of temperature change, unstable voltage of the power supply, and other factors, the static operating point changes; it is amplified and transmitted step-by-step, resulting in the deviation of the circuit output voltage from the original fixed value. [44][45][46] When the entire fluid in the static mixer line is static, the fluid near the two pressure points is also static. Theoretically, the pressure drop between the two pressure points should be 0; however, the pressure drop data collected by the differential pressure sensor at this time is a value of several Pa close to 0.…”

Section: Methodsmentioning

confidence: 99%

Experimental study on energy consumption characteristics of rotational–perforated static mixers

et al. 2023

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An ideal static mixer can achieve efficient mixing at low pressure drops. Owing to the excellent performance of the tridimensional rotational flow sieve tray (TRST) in a gas–liquid two‐phase system, the TRST structure was modified into a rotational–perforated static mixer (RPSM) to enhance mixing in multicomponent liquid systems. The energy consumption characteristics of the RPSM were experimentally studied based on Reynolds numbers in the range of 986–7892, gap L = 0–80 mm, and relative angle γ = 0–45°. The effects of the element installation method, number, gap, relative angle, fluid Reynolds number, fluid properties, and other parameters on the RPSM pressure drop were also investigated. An interaction analysis of each factor was performed using the factorial design method and an empirical model of the RPSM Z‐factor was established. Additionally, pressure drop in the RPSM was compared with those of other commonly used static mixers. Results show that, when the element is backward‐installed, the pressure drop is higher than that in the forward direction because the fluid is constantly twisted. Moreover, the pressure drop increases with increasing element gap, and the average increase is 43.64% and 19.28% for the forward and backward installations, respectively. The influence of the relative angle on the pressure drop is mainly reflected when the gap L = 0. Subsequently, the degree of influence of each factor was determined, and the Z‐factor was calculated and found to be consistent with the experimental values (relative error of less than 15%).

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“…Nonetheless, the manufacturing and packaging processes of these pressure sensors still present unresolved challenges, resulting in notable nonlinearities and temperature-dependent drift in their response characteristics [4]. To address these challenges, a range of approaches, encompassing a range of hardware and software solutions, has been suggested to incorporate thermal compensation into pressure sensor design [5]. Hardware compensation in pressure sensors, typically using analogy circuits for calibration, incorporates elements like thermistors and adjustable amplifiers.…”

Section: Introductionmentioning

confidence: 99%

Temperature compensation for piezoresistive pressure sensor based on deep learning on graphs

Xue,

Fang,

et al. 2024

J. Phys.: Conf. Ser.

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With the escalating demand for precision in piezoresistive pressure sensors to cater to a wide spectrum of applications, a significant challenge emerges due to the material properties of these sensors, which induce a substantial temperature coefficient. This limitation restricts the operational temperature range and is further exacerbated by ambient temperature variations, resulting in pronounced nonlinearity in sensor responses. To address these challenges, A new method using Graph Neural Networks (GNNs) is introduced to address nonlinearity and temperature drift in piezoresistive pressure sensors. GNNs improve the sensors’ accuracy and reliability across different temperatures, expanding their applicability. Test results show a notable accuracy enhancement, with a maximum full-scale error below 0.05% and even lower in specific ranges (under 0.04%). This precision makes the method ideal for industrial pressure sensor applications and production, offering significant benefits.

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Research on Temperature Zero Drift of SiC Piezoresistive Pressure Sensor Based on Asymmetric Wheatstone Bridge

Cited by 13 publications

References 27 publications

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

Experimental study on energy consumption characteristics of rotational–perforated static mixers

Temperature compensation for piezoresistive pressure sensor based on deep learning on graphs

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