Abstract:Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To a… Show more
“…Better conductivity will bring better sensing performance. 13 At the same time, according to the Joule heating principle, conductive materials can convert electric energy into heat energy, 14,15 so it is possible to have both sensing performance and heatable performance, and having these two functions at the same time will make wearable products both intelligent and comfortable.Figure 1.Principle of piezoresistive pressure sensor.…”
The increasing advancements in science and technology have led to a growing demand for wearable products. In this paper, copper sulfide/melamine foam composites were prepared by chemical deposition of copper sulfide on the melamine foam skeleton. The effects of different deposition amount of copper sulfide on its microstructure, and electrical conductivity were studied. The results showed that the composite had good electrical conductivity and flexibility when the reaction solution concentration was 1 wt.%. The material can be used as an electric heater, the surface of the material can be heated to 145°C under the low voltage of 4 V, and the material can also be used as a flexible pressure sensor with a high sensitivity of 0.385 kPa−1 and a stability of more than 2000 cycles. Materials based on flexible copper sulfide/melamine foams can be used for electric heaters and flexible pressure sensor, which will make them promising applications in wearable products.
“…Better conductivity will bring better sensing performance. 13 At the same time, according to the Joule heating principle, conductive materials can convert electric energy into heat energy, 14,15 so it is possible to have both sensing performance and heatable performance, and having these two functions at the same time will make wearable products both intelligent and comfortable.Figure 1.Principle of piezoresistive pressure sensor.…”
The increasing advancements in science and technology have led to a growing demand for wearable products. In this paper, copper sulfide/melamine foam composites were prepared by chemical deposition of copper sulfide on the melamine foam skeleton. The effects of different deposition amount of copper sulfide on its microstructure, and electrical conductivity were studied. The results showed that the composite had good electrical conductivity and flexibility when the reaction solution concentration was 1 wt.%. The material can be used as an electric heater, the surface of the material can be heated to 145°C under the low voltage of 4 V, and the material can also be used as a flexible pressure sensor with a high sensitivity of 0.385 kPa−1 and a stability of more than 2000 cycles. Materials based on flexible copper sulfide/melamine foams can be used for electric heaters and flexible pressure sensor, which will make them promising applications in wearable products.
“…Piezoresistive mechanical sensors have attracted much attention for monitoring subtle mechanical forces, owing to their advantages of facile fabrication, 18 low power consumption, 19 and easy integration. 20 The sensitive layer of piezoresistive sensor deforms when external pressure is applied, thus affecting the signal output. 21 Piezoresistive sensors can be classified into strain sensors and pressure sensors according to the monitored mechanical modes.…”
The development of pressure sensors with high sensitivity and a low detection limit for subtle mechanical force monitoring and the understanding of the sensing mechanism behind subtle mechanical force monitoring are of great significance for intelligent technology. Here, we proposed a graphene-based two-stage enhancement pressure sensor (GTEPS), and we analyzed the difference between subtle mechanical force monitoring and conventional mechanical force monitoring. The GTEPS exhibited a high sensitivity of 62.2 kPa −1 and a low detection limit of 0.1 Pa. Leveraging its excellent performance, the GTEPS was successfully applied in various subtle mechanical force monitoring applications, including acoustic wave detection, voice-print recognition, and pulse wave monitoring. In acoustic wave detection, the GTEPS achieved a 100% recognition accuracy for six words. In voiceprint recognition, the sensor exhibited accurate identification of distinct voiceprints among individuals. Furthermore, in pulse wave monitoring, GTEPS demonstrated effective detection of pulse waves. By combination of the pulse wave signals with electrocardiogram (ECG) signals, it enabled the assessment of blood pressure. These results demonstrate the excellent performance of GTEPS and highlight its great potential for subtle mechanical force monitoring and its various applications. The current results indicate that GTEPS shows great potential for applications in subtle mechanical force monitoring.
“…For these exceptional performances, such as linearity, great sensitivity to pressure, and its small size. The piezoresistive pressure sensor is the most widespread among pressure sensors, which makes it the most widely used in many areas [1][2][3][4][5][6]. Nevertheless, their major drawback is the temperature drifts [7][8][9][10][11], especially those generated by self-heating due to the applied electrical potential.…”
In this work, we present an analysis based on the study of mobility, which is a very important electrical parameter of a piezoresistor and which is directly bound to the piezoresistivity effect in the piezoresistive pressure sensor. We determine how temperature affects mobility when an electrical potential is applied. For that end, a theoretical and numerical approach based on mobility in p-type Silicon piezoresistor and a finite difference model (FDM) for self-heating has been developed. So, the evolution of mobility has been established versus time for different doping levels and with temperature rise using a numerical model combined with that of mobility. Furthermore, it has been calculated for some geometric parameters of the sensor such as membrane side length and its thickness. Also, it is computed as a function of bias voltage. It was observed that mobility is strongly affected by the temperature rise induced by the applied potential when the sensor is actuated for a prolonged time. As a consequence, there is a drift in the output response of the sensor. Finally, this work makes it possible to predict their temperature behavior due to self-heating and to improve this effect by optimizing the geometric properties of the device and by reducing the voltage source applied to the bridge.
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