Research on laser interference lithography based on mutual injection dual-output laser

Zhang, Yipeng; Li, Yongliang; Chao, Yang; Zhang, Yingming; Liu, Hongxin; Hu, Weiwei; Gu, Xiaokun

doi:10.1016/j.ijleo.2019.02.091

Cited by 4 publications

(1 citation statement)

References 24 publications

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“…As an important optical element, diffraction grating has the properties of dispersion [1][2][3][4][5][6], beam splitting [7][8][9][10][11], polarization [12][13][14][15][16][17] and phase matching [18][19][20][21][22] and shows a wide range of applications in different fields. For example, diffraction gratings with high dispersion and high diffraction efficiency, such as the core components in laser pulse compression [23], laser frequency selection [24] and spectral beam combining [25] are widely used in high-power laser systems.…”

Section: Introductionmentioning

confidence: 99%

Modeling and analysis of bi-function separation under second Bragg incidence by T-type microstructure

Fu¹,

Wang²

2021

Laser Phys.

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A one-port reflector for transverse-electric (TE) polarization and a two-port beam splitter for transverse-magnetic (TM) polarization is proposed by T-type double-layer fused-silica grating. After optimization calculations, 97.87% single-order high-efficiency reflection under TE polarization and 48.70%/48.71% highly uniform dual-order beam splitting under TM polarization are finally obtained. In addition, the normalized electric field and magnetic field diagrams of the grating are obtained using the finite element method. Finally, the incident characteristics and process tolerances of the grating are analyzed, and a range of structural parameters that meets good reflection efficiency is found. The design and study of polarization-dependent gratings carried out in this paper are of great significance for increasing the output power of laser systems and improving the stability of optical devices when unpolarized lasers are incident.

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