Reproducibility and accuracy of spatial measurements from digitally captured images in the environmental scanning electron microscope

One of the unique abilities of the environmental scanning electron microscope is that it permits realtime dynamic observations of materials under controlled temperature/atmosphere conditions [1]. The need for accurate and precise measurements of dimensional changes at elevated temperatures arise in many material areas including determining the longitudinal and transverse coefficient of thermal expansion of fibers, sintering studies, hydration and dehydration of absorbent polymers, and strain measurement of materials under an applied load. The purpose of this research is to evaluate the capabilities of an ElectroScan 2020 environmental scanning electron microscope (ESEM™) in performing precise in situ spatial measurements at elevated temperatures. Identification and proposed solution and/or compensation of imaging difficulties such as specimen drift, sample stability, and thermal strain of a reference grid are addressed.In general, the accuracy of spatial measurements in a scanning electron microscope (SEM) depends on several factors including calibration of the scanned area, the effects of lens hysteresis and reproducibility in the working distance and column alignment.

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Diagnosis of Magnification Stability and Non-Linearity in SEMs

Sicignano¹,

Eremin²,

Nikitin³

2000

Microsc Microanal

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Summary: In recent years the SEM has advanced from an instrument used primarily for imaging to a tool for performing precise and accurate measurements of features. The SEM has been widely adapted by workers in diverse technical fields such as: integrated circuit (IC) processing, micro electro-mechanical devices (MEMs) design and molecular biology research. The SEM user in need of acquiring accurate dimensional information about their samples normally relies on the magnification readings and settings provided by the instrument maker. Tools to evaluate the precision of these physical dimensions or to assist in understanding the state of the SEM are not currently available. This paper presents a new methodology based on novel software and hardware to provide the user with capability of diagnosing the magnification stability and non-linearity of their SEMs prior to attempting accurate and precise feature measurements. Examples will be presented demonstrating the diagnosis of magnification stability and non-linearity in SEMs located at 4 independent sites.

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Reproducibility and accuracy of spatial measurements from digitally captured images in the environmental scanning electron microscope

Cited by 4 publications

References 3 publications

Description of Microstructural Changes in Wheat Flour and Flour Components during Hydration by using Environmental Scanning Electron Microscopy

Description of Microstructural Changes in Wheat Flour and Flour Components during Hydration by using Environmental Scanning Electron Microscopy

Accuracy of Spatial Measurements at Elevated Temperatures in an Environmental Scanning Electron Microscope

Diagnosis of Magnification Stability and Non-Linearity in SEMs

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