Diagnosis of Magnification Stability and Non-Linearity in SEMs

Abstract

<jats:p>Summary: In recent years the SEM has advanced from an instrument used primarily for imaging to a tool for performing precise and accurate measurements of features. The SEM has been widely adapted by workers in diverse technical fields such as: integrated circuit (IC) processing, micro electro-mechanical devices (MEMs) design and molecular biology research. The SEM user in need of acquiring accurate dimensional information about their samples normally relies on the magnification readings and settings provided by the instrument maker. Tools to evaluate the precision of these physical dimensions or to assist in understanding the state of the SEM are not currently available. This paper presents a new methodology based on novel software and hardware to provide the user with capability of diagnosing the magnification stability and non-linearity of their SEMs prior to attempting accurate and precise feature measurements. Examples will be presented demonstrating the diagnosis of magnification stability and non-linearity in SEMs located at 4 independent sites.</jats:p>