“…The 4-cm 2 MSNDs were patterned with 20-μm-wide trenches and a 40-μm pitch. With this trench layout, and greatly improved fabrication techniques, the MSNDs typically have an intrinsic thermal neutron detection efficiency of 25-30%, as calibrated with a 3 He proportional detector with a thermalized and diffracted neutron beam; measurement method and details described in the literature [26]. The MSNDs were calibrated in the 0.5 mm-diameter thermal neutron beam such that the beam was normal to, and completely incident upon, each of the MSNDs.…”