Reoxidation of silicon nitride studied using x-ray photoelectron spectroscopy and transmission electron microscopy

Gilmore, Damien; Cai, Will; Iyer, Dorai; Burgin, Rebecca; Averett, Guy; Kamekona, Keith; Shastri, S.; Schoonover, Brian

doi:10.1063/1.1631068

Cited by 5 publications

(1 citation statement)

References 16 publications

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“…111 The surface can be generally conditioned using standard approaches such as exposure to a suitable oxidizing or reducing environment, or wet etching including hydrofluoric acid (and analogues) or piranha solution (and analogues). 20,47,64,102,106,108,[114][115][116][117][118][119][120][121][122][123] Specialized extensions of these methods can bring additional chemical flexibility. 20,64,104 Silane chemistry is a common route to surface chemical functionalization, but one that can be undermined by insufficient attention to either the SiN x process history or to the demands of the silane reaction itself.…”

Section: Thin-film Silicon Nitride Membranesmentioning

confidence: 99%

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Dwyer

Harb

2017

Appl Spectrosc

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We present a review of the use of selected nanofabricated thin films to deliver a host of capabilities and insights spanning bioanalytical and biophysical chemistry, materials science, and fundamental molecular-level research. We discuss approaches where thin films have been vital, enabling experimental studies using a variety of optical spectroscopies across the visible and infrared spectral range, electron microscopies, and related techniques such as electron energy loss spectroscopy, X-ray photoelectron spectroscopy, and single molecule sensing. We anchor this broad discussion by highlighting two particularly exciting exemplars: a thin-walled nanofluidic sample cell concept that has advanced the discovery horizons of ultrafast spectroscopy and of electron microscopy investigations of in-liquid samples; and a unique class of thin-film-based nanofluidic devices, designed around a nanopore, with expansive prospects for single molecule sensing. Free-standing, low-stress silicon nitride membranes are a canonical structural element for these applications, and we elucidate the fabrication and resulting features-including mechanical stability, optical properties, X-ray and electron scattering properties, and chemical natureof this material in this format. We also outline design and performance principles and include a discussion of underlying material preparations and properties suitable for understanding the use of alternative thin-film materials such as graphene.

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Section: Thin-film Silicon Nitride Membranesmentioning

confidence: 99%

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Dwyer

Harb

2017

Appl Spectrosc

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Well-suppressed interface states and improved transport properties of AlGaN/GaN MIS-HEMTs with PEALD SiN gate dielectric

Zhang

et al. 2021

Vacuum

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Silicon Nitride Thin Films for Nanofluidic Device Fabrication

et al. 2016

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Silicon nitride is a ubiquitous and well-established nanofabrication material with a host of favourable properties for creating nanofluidic devices with a range of compelling designs that offer extraordinary discovery potential. Nanochannels formed between two thin silicon nitride windows can open up vistas for exploration by freeing transmission electron microscopy to interrogate static structures and structural dynamics in liquid-based samples. Nanopores present a strikingly different architecture—nanofluidic channels through a silicon nitride membrane—and are one of the most promising tools to emerge in biophysics and bioanalysis, offering outstanding capabilities for single molecule sensing. The constrained environments in such nanofluidic devices make surface chemistry a vital design and performance consideration. Silicon nitride has a rich and complex surface chemistry that, while too often formidable, can be tamed with new, robust surface functionalization approaches. We will explore how a simple structural element—a ∼100 nm-thick silicon nitride window—can be used to fabricate devices to wrest unprecedented insights from the nanoscale world. We will detail the intricacies of native silicon nitride surface chemistry, present surface chemical modification routes that leverage the richness of available surface moieties, and examine the effect of engineered chemical surface functionality on nanofluidic device character and performance.

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Reoxidation of silicon nitride studied using x-ray photoelectron spectroscopy and transmission electron microscopy

Cited by 5 publications

References 16 publications

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Well-suppressed interface states and improved transport properties of AlGaN/GaN MIS-HEMTs with PEALD SiN gate dielectric

Silicon Nitride Thin Films for Nanofluidic Device Fabrication

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