2020
DOI: 10.1021/acsami.0c03986
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Reliable and Robust Fabrication Rules for Springtail-Inspired Superomniphobic Surfaces

Abstract: We report a reliable and robust method for the fabrication of bioinspired superomniphobic surfaces with precise concave-cap-shaped micropillar arrays. This method includes silicon-based conventional microelectromechanical systems (MEMS) and polymer replication processes. We have elucidated two critical cases of fabrication rules for precise micromachining of a negative-shaped bioinspired silicon master. The fabricated polymeric structure replicated from the semipermanent silicon master based on the design rule… Show more

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Cited by 11 publications
(7 citation statements)
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“…Several studies have been conducted on mimicking this unique microstructure surface, most of which were focused on rigid microstructures; , however, only a few elastomeric Dual-T structures have been proposed. , Kim et al obtained the PDMS Dual-T surface through a two-step fabrication method. In the first step, the umbrella-like re-entrant (T) structures were made by a photolithography-based molding process. ,, In the second step, the thin cap edges of the T microstructures were bent by vacuum vapor deposition of an aluminum film onto the microstructures, creating the downward overhangs with a maximum bending angle of 84°.…”
Section: Introductionmentioning
confidence: 99%
“…Several studies have been conducted on mimicking this unique microstructure surface, most of which were focused on rigid microstructures; , however, only a few elastomeric Dual-T structures have been proposed. , Kim et al obtained the PDMS Dual-T surface through a two-step fabrication method. In the first step, the umbrella-like re-entrant (T) structures were made by a photolithography-based molding process. ,, In the second step, the thin cap edges of the T microstructures were bent by vacuum vapor deposition of an aluminum film onto the microstructures, creating the downward overhangs with a maximum bending angle of 84°.…”
Section: Introductionmentioning
confidence: 99%
“…PDMS and other silicones are also widely used in micro‐ and nano‐applications due to outstanding hydrophobicity and strippability. Recently, silicone structures with various properties were fabricated using molding techniques, and new functionality is expected to be implemented 4,5 …”
Section: Introductionmentioning
confidence: 99%
“…Recently, silicone structures with various properties were fabricated using molding techniques, and new functionality is expected to be implemented. 4,5 On the other hand, there are important fields where silicones are used in the form of thin films. Normally, films can be deposited on arbitrary substrates by spin coating of liquid silicones.…”
Section: Introductionmentioning
confidence: 99%
“…A surface that can repel liquids with both high (e.g., water) and low (e.g., oil) surface tension (γ lv ) has demonstrated potential for a wide range of practical applications including oil–water separation, self-cleaning, , drag reduction, , and corrosion resistance , due to its extreme liquid repellency . Designing such a superomniphobic surface [i.e., a surface that displays apparent contact angles (θ*) greater than 150° and a roll-off angle (ω) less than 10° with virtually all liquids] involves a low-solid-surface-energy (γ sv ) coating along with surface roughness .…”
Section: Introductionmentioning
confidence: 99%