Reliability of MEMS devices in shock and vibration overload situations

Abstract

This contribution describes the investigation of the reasons for overload failure and overload reaction based on linear vibration theory by decomposition of the complex reaction into resonant mode reactions and on observation of the reaction. An impulse specific peak deflection (ISPD) is derived as a general characteristic property of a certain shock. It is applicable to predict the mechanical deflection of a certain resonant mode of an arbitrary resonant frequency due to a shock. This is further analyzed and proofed by scanning Laser Doppler interferometer (SLDI) measurement on the example of a Fabry Perot interferometer based tunable infrared filter. The results from ISPD prediction are compared to SLDI measurements and to finite element analysis results

The response of a micro-electro-mechanical system (MEMS) cantilever-paddle gas sensor to mechanical shock loads

“…Hence, they are required to be tested under mechanical shock to ensure their survivability in various hostile environments. Several works have been published studying the reliability of MEMS devices under mechanical shock: They attempted on investigating experimentally the effect of shock loads on several MEMS devices such as sensors (Baselta at al., 2003;Sundaram et al, 2011), resonators (Kazinczi et al, 2002;Kurth et al, 2008), accelerometers (Ghaffarian et al, 2002;Currano et al, 2008;, Ghisi et al, 2008Walter, 2008;Wang and Li, 2010), microcantilever switches (Robinson et al, 1987;Fang et al, 2004;Sheehy et al, 2009), converters, magnetometers, microphones, and gyroscopes (Yee et al, 2002, Nouira et al, 2007Yang et al, 2010;Vahdat et al, 2011). Other groups attempting to control MEMS devices under variable loadings (Shin et al, 2009;Alsaleem and Younis, 2010), whereas others used the combined effect of shock impulse with electrostatic loading to suggest a MEMS shock/acceleration threshold sensor (Frobenius et al, 1972;Loke et al, 1991;Man et al, 1994;Go et al, 1996;Noetzel et al, 1996;Tonnesen et al, 1997;Wycisk et al, 2000;Selvakumar, 2001;Matsunaga and Esashi, 2002;McNamara and Gianchandani, 2004;Jia et al, 2007;Guo et al, 2011).…”

Low voltage, high speed and small area in-plane MEMS switch

“…But some disadvantages have to be taken into consideration. (1) with a smaller gap between movable and fixed comb electrodes, the devices become vulnerable under shock and vibration [25,26], which are inevitable in the industrial applications. (2) driving force generated by cantilever is not as strong as that generated by the combs as shown in figure 1(a).…”