2010
DOI: 10.1016/j.mechmachtheory.2009.12.006
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Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator

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Cited by 67 publications
(32 citation statements)
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“…Therefore, amplification mechanisms are needed. Flexure-based compliant mechanism is the first choice, which has no backlash, no lubrication requirement, repeatable motion and vacuum compatibility [7][8][9][10]. Levertype mechanism is the most common one [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, amplification mechanisms are needed. Flexure-based compliant mechanism is the first choice, which has no backlash, no lubrication requirement, repeatable motion and vacuum compatibility [7][8][9][10]. Levertype mechanism is the most common one [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…There are plenty of typical designs of XYZ compliant manipulators from non-commercial academic inventions [11][12][13][14][15] and commercialised products in market [16][17]. Despite their many good characteristics, these existing designs can still be improved.…”
Section: Introductionmentioning
confidence: 99%
“…Despite their many good characteristics, these existing designs can still be improved. The designs in [11,12] produce a small range of motion and large stress concentration and are very sensitive to manufacturing, due to the use of lumpedcompliance modules. Recently, Awtar et al [13] proposed a novel large-range XYZ parallel kinematic flexure mechanism with geometrically decoupled DOF (degree of freedom) using identical flexure plates/leaves, which has a more compact and simpler construction.…”
Section: Introductionmentioning
confidence: 99%
“…Kinetostatic coupling may lead to complicated motion control, which is the sufficient condition of kinematic decoupling. A number of literatures have reported the design of decoupled XYZ CPMs for motion/positioning stage and sensing applications (Hao andKong, 2009, 2012b;Gao and Zhang, 2010;Li and Xu, 2011;Pham et al, 2006;Yue et al, 2010;Tang et al, 2006) using kinematics design methods (Hao, 2011). Here, each of the three kinematic legs/chains, which are coupled in parallel, is individually a serial-parallel hybrid arrangement.…”
Section: Introductionmentioning
confidence: 99%
“…But none of them have showed the possibility for monolithic fabrication. Also, these designs have their own limitations such small motion range (Li and Xu, 2011;Pham et al, 2006;Yue et al, 2010), bulky and complex configuration (due to the serial-parallel hybrid arrangement) (Li and Xu, 2011;Pham et al, 2006;Hao and Kong, 2009;Tang et al, 2006), and poor out-of-plane stiffness of the PP plane in each leg (Li and Xu, 2011;Pham et al, 2006;Hao and Kong, 2009;Yue et al, 2010;Tang et al, 2006). Recently, Awtar et al (2013) proposed a novel XYZ parallel kinematic flexure mechanism with geometrically decoupled DoF using identical flexure plates, which has a more compact and simpler construction and has the possibility to be fabricated monolithically.…”
Section: Introductionmentioning
confidence: 99%