“…Generally speaking, the flexure-based micromanipulation stage has limited workspace, to overcome this drawback, many different kinds of amplification mechanisms are adopted to amplify the stroke of piezoelectric actuators. Lu et al designed compliant parallel micro motion stage with two translations (along X and Y direction) and one rotation (around Z axis), also adopted piezoelectric actuators, but without amplification mechanism, the drawback of this design is the very small workspace (Lu et al, 2004); Bhagat et al also designed a planar 3-DOF micromanipulator, this mechanism adopted three piezoelectric actuators to achieve required displacements in X, Y and θ and utilized lever amplifier to enhance the displacement of the mechanism (Bhagat et al, 2014); Hao fabricated a flexure-based spatial 3-DOF compliant parallel mechanism with three translational motions along X, Y and Z axis, respectively, moreover this monolithic CPM can be used as positioning stage, acceleration sensor and energy harvesting device (Hao, 2013); Wang and Zhang proposed a 3-DOF nanopositioning stage with two-level lever amplifier with over two hundreds of microns translational displacement along x/y, however the rotational scope and natural frequency are relatively small in Wang and Zhang (2016). In addition, other researchers have also designed many kinds of 3-DOF compliant parallel stages with different characteristics (Dong et al, 2016;Tian and Shirinzadeh, 2009).…”