1998
DOI: 10.1002/(sici)1099-0488(19980130)36:2<319::aid-polb10>3.0.co;2-k
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Relation between plasmons and ion-induced damaging in cellulosic derivatives

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Cited by 7 publications
(3 citation statements)
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“…The resulting removal of matter induces the shrinkage effect, that is to say the etching by dry process. Of course, all these phenomena, which are characteristic of organic compounds and does not occur in minerals, depend on the ion fluence, on the ion fluence rate, and on the ion beam energy 22–24. They have been studied for classical values of these parameters in the cited references.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The resulting removal of matter induces the shrinkage effect, that is to say the etching by dry process. Of course, all these phenomena, which are characteristic of organic compounds and does not occur in minerals, depend on the ion fluence, on the ion fluence rate, and on the ion beam energy 22–24. They have been studied for classical values of these parameters in the cited references.…”
Section: Methodsmentioning
confidence: 99%
“…The sweep of the polymer film by the FIB has to be finely adjusted not only according to the considered polymer, but also according to the pattern design, to the film thickness and to the substratum nature 24, 25. So, each physical structure laid down by the device process implies new values for the etching parameters adjustment.…”
Section: Methodsmentioning
confidence: 99%
“…This selectivity has been explained on the basis of the Brandt^Richtie model, and some consequences pertaining to the characteristics of the valence band structure have been deduced with a view to electronic applications. 573…”
Section: Radiolysis By Fast Heavy Ions or Protonsmentioning
confidence: 99%