Refractive index of some oxide and fluoride coating materials

Smith, David J.; Baumeister, Philip

doi:10.1364/ao.18.000111

Cited by 80 publications

(31 citation statements)

References 17 publications

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“…The material dispersion of Ta 2 O 5 is variable dependent on the exact deposition technique, and annealing details [6]. Modelling using both effective index and finite difference techniques has been carried out, and while detailed behavior of the modes depends on the exact material dispersion, the form of the group index variation is consistent with our measured data.…”

supporting

confidence: 69%

Waveguide group velocity determination by spectral interference measurements in near-field optical scanning microscopy

Mills

Chaipiboonwong

Charlton

et al. 2006

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference

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Measurement of spectral interference with a near-field scanning optical microscope is used to determine directly the variation of group velocity between modes of a planar slab waveguide as the modes propagate along the guide. Near-field scanning microscopy (NSOM) can be used to probe the optical fields inside planar optical waveguides. The advantage of NSOM is that although the properties of ideal waveguide systems can be modelled, NSOM can give real data to show how the devices perform in the presence of imperfection, or in cases where modelling is difficult and not well-understood. NSOM has been applied to waveguide systems from simple Y-junction couplers [1] to complex photonic crystal waveguides [2]. For ultrafast pulses, NSOM, combined with modulation techniques, has been used to image pulses propagating in rib waveguides [3], and recently in photonic crystal waveguides [4]. Measurement of propagation in this way can provide information about the group velocity within the guide, by measuring directly how the pulse envelope moves as a function of time. However, these measurements are complex and time-consuming, as the pulse must be carefully tracked as it propagates down a considerable length of guide. In this paper we demonstrate a simple way to measure group velocity differences between different modes in a planar guide, using the broad spectrum of the femtosecond pulse to advantage. In a multimode guide, a launched pulse may couple into in several different modes, which will propagate at different group velocities. As the pulses travel down the guide, they will separate in time. An NSOM probe at some point along the guide can pick up the field from all the different modes, and once these fields are superposed, different spectral components can interfere to produce modulation across the spectrum in the same way that can be seen from the output of, for example, a Michelson interferometer [5]. The time spacing of the pulses can be related directly to the period of the fringe modulation across the spectrum. The fringes are only

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supporting

confidence: 69%

Waveguide group velocity determination by spectral interference measurements in near-field optical scanning microscopy

Mills

Chaipiboonwong

Charlton

et al. 2006

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference

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“…The average refractive index of bulk SrO [43] and HfO 2 [44], 1.95, was used in the thickness calculation. Film compositions were determined with RBS spectrometry using a spectrometer obtained from NEC with an MAS 1700 end station.…”

Section: Methodsmentioning

confidence: 99%

Synthesis and Structures of Bis(2‐dimethylaminoethyl)amine Adducts of Strontium Bis(2,2,6,6‐tetramethylheptane‐3,5‐dionate) and Their Use in the CVD of Cubic Strontium‐Doped Hafnium Dioxides

Luo¹,

Yu²,

Kucera³

et al. 2007

Chemical Vapor Deposition

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Monomeric, eight-coordinate Sr(tmhd) 2 [HN(CH 2 CH 2 NMe 2 ) 2 ](EtOH) (1), where tmhd is 2,2,6,6-tetramethylheptane-3,5-dionato, is synthesized from the reactions of HN(CH 2 CH 2 NMe 2 ) 2 , H-tmhd, and Sr(OEt) 2 (EtOH) 4 . Heating compound 1 at 130°C dissociates EtOH to form monomeric, seven-coordinate Sr(tmhd) 2 [HN(CH 2 CH 2 NMe 2 ) 2 ] (2). A combination of thermogravimetric analysis (TGA) and thermal stability tests establishes that compound 2 is stable at temperatures below 220°C. In a cold-wall, low-pressure CVD reactor, 2 is used as a liquid precursor at 115 to 175°C to deposit high-j, dielectric, strontium hafnium oxide films in combination with the use of Hf(O t Bu) 4 . The Sr/(Sr + Hf) atomic ratios of the films range from 0 to 0.83. X-ray diffraction (XRD) shows that films with low Sr doping, e.g., ≤ 0.15, exhibit a crystalline phase consistent with Sr-stabilized cubic hafnia, while films with higher Sr contents are amorphous. The dielectric constants of the films increase as the proportion of the cubic phase increases. A maximum value of 25 is obtained for the film with a Sr/(Sr + Hf) ratio of 0.07.

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“…The properties of the film, however, highly depend on the deposition method chosen as well as the deposition conditions (substrate nature and temperature, partial gas pressure, and deposition rate). For this reason, the link between optical properties and microstructure has been widely investigated [24][25][26][27][28][29].…”

Section: Introductionmentioning

confidence: 99%

Determination of Optical Properties of Thin Films from Ketteler-Helmholtz Dispersion Relations: Application to the Case of Ultraviolet Irradiated Zirconium Oxide

Desforges

Robichaud

Gauvin

2017

Advances in Materials Science and Engineering

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A new method based on the Ketteler-Helmholtz dispersion relations is described. This method allows accurately determining the optical properties of thin films from a single transmittance curve. The case of zirconium oxide thin film postdeposition irradiated with ultraviolet light is analysed. The effect of ultraviolet irradiation is compared with low temperature postdeposition heating. It is shown that both processes have a comparable effect on the optical properties of the films. However, as our analysis leads to inferring that ultraviolet irradiation produces smoother film surfaces, the use of ultraviolet irradiation is an interesting alternative to the heating process. Accordingly, the reduction of light scattering from the interface with air provides films of better optical quality, which is especially valuable in case of multilayer systems.

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Refractive index of some oxide and fluoride coating materials

Abstract: Spectroreflectometry was used to measure the refractive index of the following optical coating materials: Ta(2)O(5), HfO(2), Y(2)0(3), La(2)O(3), ZrO(2), CeO(2), CeF(3), LaF(3), NdF(3), MgF(2) in the 250-2000-nm spectral range.

Cited by 80 publications

References 17 publications

Waveguide group velocity determination by spectral interference measurements in near-field optical scanning microscopy

Waveguide group velocity determination by spectral interference measurements in near-field optical scanning microscopy

Synthesis and Structures of Bis(2‐dimethylaminoethyl)amine Adducts of Strontium Bis(2,2,6,6‐tetramethylheptane‐3,5‐dionate) and Their Use in the CVD of Cubic Strontium‐Doped Hafnium Dioxides

Determination of Optical Properties of Thin Films from Ketteler-Helmholtz Dispersion Relations: Application to the Case of Ultraviolet Irradiated Zirconium Oxide

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